Semiconductors are to the information age what engines are to the industrial age. Chips are the steam engine, the internal combustion engine, and the fractional horsepower engine rolled up into one. The Chip History Center is dedicated to preserving that history for future generations.

Title Summary Relevant date Last updated
Advantest
  Advantest: What made it a Su ... Toshio Maruyama reflects on the history and future of Advantest and its role in semiconductor ATE. 05 Jan 2006 23 May 2019
Advantest - ATE Cost-Efficie ... Advantest - Improvements in Cost-Efficiency via parallel memory IC test highlights from this 1986 ... 21 Oct 2019
Takeda Riken – Reliab ... Takeda Riken, the antecedent to Advantest, built it's brand on Semiconductor ATE reliability level ... 31 Mar 1983 21 Oct 2019
Takeda Riken Enters US ATE M ... Takeda Riken announces plans to enter the US ATE (automatic test equipment) market with a 5O-MHz l ... 15 Jun 1982 21 Oct 2019
Takeda Riken – Growt ... Takeda Riken, the antecedent to Advantest, was hardly known outside Japan in 1980 and by 1985 it w ... 21 Oct 2019
Advantest's 50th Anniversary Advantest turned 50 on July 1, 2004. It was a milestone for one of Japan's greatest tech companies ... 23 May 2019
  Is Test Adding More Value th ... Jack Trautman, Senior Vice President and GM of Agilent’s ATG, addresses the question of the ... 18 Nov 2003 21 Sep 2017
Advantest - T3342 VLSI Test ... Advantest - T3342 VLSI Test System :1985-89 10 Aug 2017
Applied Materials
Applied Materials - Endura 5 ... Applied Materials - Endura 5500 PVD: The first bullet-proof multi-chamber, multi-process system. I ... 12 Jul 1990 18 Oct 2019
Applied Materials' Producer ... The Chip Insider's review of Applied Materials' Producer at its introduction 04 Jul 1998 03 Jul 2018
Applied Materials introduces ... Applied Materials’ Producer marked an important turning point in the history of the semicon ... 01 Jul 1998 03 Jul 2018
Applied Materials - AME 8100 ... Applied Materials - AME 8100 Batch Etcher :1980-84 - The blockbuster that remapped the etch market ... 30 Jun 1985 26 Apr 2018
Applied Materials - P5000, E ... Applied Materials - P5000, Etcher :1985-89 - Followed the 8300, but was eclipsed. 31 Aug 2017
Applied Materials - Nitrox A ... Applied Materials - Nitrox AMN-710 :1960s - Improved yields by sealing oxide pin holes. 31 Aug 2017
Applied Materials - AMS 2000 ... Applied Materials - AMS 2000 Silox Reactor :1970s 31 Aug 2017
Applied Materials - Precisio ... Applied Materials - Precision 5000 CVD, The blockbuster that made cluster tool a household name (a ... 30 Jun 1985 31 Aug 2017
  Building Applied Materials i ... Dan Maydan talks about how Applied Materials built it into a multi-billion dollar, multi-product c ... 01 Dec 2005 31 Aug 2017
Applied Materials - The Omeg ... Applied Materials - The Omega-Centura System :1990s 31 Dec 1969 10 Aug 2017
Applied Materials - SPCVD-40 ... Applied Materials - SPCVD-4000 :1960s - An LPCVD tool from a time when Applied could do little rig ... 10 Aug 2017
Applied Materials - Silox Mo ... Applied Materials - Silox Model AMS 2600 & 2660 :1960s - An early tool for low temperature oxides. ... 10 Aug 2017
Applied Materials - Silox Mo ... Applied Materials - Silox Model AMS 1200 :1960s - Wafers were laid out by hand inside the chambers ... 10 Aug 2017
Applied Materials - Precisio ... Applied Materials - Precision Implant 9000 :1985-89 - Lintott’s child and another blockbust ... 10 Aug 2017
Applied Materials - Precisio ... Applied Materials - Precision Etch 8300 :1985-89 - The extension of the blockbuster that remapped ... 10 Aug 2017
Applied Materials - PECVD_ap ... Applied Materials - PECVD_application-bulletin :1970s 10 Aug 2017
Applied Materials - Implant ... Applied Materials - Implant 9000, Ion Implanter :1985-1989 10 Aug 2017
Applied Materials - CA-800 M ... Applied Materials - CA-800 Mask Aligner and Exposure System: :1980-84 10 Aug 2017
Applied Materials - CA-2020H ... Applied Materials - CA-2020H Mask Aligner :1980-84 10 Aug 2017
Applied Materials - Autolign ... Applied Materials - Autolign CA 3400 Mask Aligner :1980-84 - The remnants of a failed merger. 10 Aug 2017
Applied Materials - AMS 1000 ... Applied Materials - AMS 1000 Silox Reactor :1970s 10 Aug 2017
Applied Materials - 7830Si C ... Applied Materials - 7830Si CD-SEM :1990s - Opal’s child. 10 Aug 2017
Applied Materials Series 760 ... The system that built the company. 30 Jun 1975 31 Jul 2017
Applied Materials - AMV CVD ... Applied materials vertical rotary reactors are widely used by chemical vapor deposition (CPD)... 30 Jun 1965 31 Jul 2017
  Keys to Success In the final installment of this three-part interview, Jim Morgan expands on the strategies that m ... 23 Mar 2006 31 Jul 2017
  Building a Global Position The second part of this three-part interview covers Applied Materials in the 1980s and its transfo ... 16 Mar 2006 31 Jul 2017
  Bringing Focus to AMAT Jim Morgan talks about the early days of Applied Materials; how he brought focus by paring down th ... 07 Mar 2006 31 Jul 2017
Solution Selling 1977: Semic ... Applied Materials led the way out of selling products to seeking solutions to customer needs as ea ... 05 Apr 1977 30 Jul 2017
  Lessons Learned at Applied M ... Dan Maydan gives his tips about how to be successful running a technology company in the lessons l ... 12 Dec 2005 24 Jul 2017
  The Early Days of Applied Ma ... Dan Maydan talks about the early days of turning Applied Materials into a technology company 29 Nov 2005 24 Jul 2017
ASML
Reflect & Imagine 20 Years o ... In 2004, ASML turned 20. This book was originally published to give employees an insight into the ... 28 Aug 2017
  The Rise of ASML Martin van den Brink, employee number 1 at ASML, describes what it's been like to take on Japan's ... 26 Jul 2006 31 Jul 2017
ASML - PAS 2500/10 Stepper ASML - PAS 2500/10 Stepper :1985-89 15 Jun 1986 06 Sep 2018
ASML - Philips Beamwriter ASML - Philips Beamwriter :1985-89 10 Aug 2017
ASML - Twinscan, Step & Scan ... Just as the first lights of a new millennium were dawning in 1999, ASML announced its newest litho ... 30 Jun 1995 01 Aug 2017
ASML - PAS 5500/400, Step & ... Though not the first step & scan system—that honor goes to Perkin Elmer—this unit wa ... 30 Jun 1995 01 Aug 2017
ASML - PAS 2500 Series Wafer ... The system that built the company. 30 Jun 1985 01 Aug 2017
ASML - PAS 2000 Wafer Steppe ... Virtually everyone seemed to be entering the semiconductor capital equipment business in the early ... 30 Jun 1985 01 Aug 2017
Canon
Canon - Various models of Ma ... Canon - Various models of Mask Aligners :1980-84 - The only company to offer all 3 types of litho ... 31 Aug 2017
Canon - FPA-5000 ES2 Aligner Canon - FPA-5000 ES2 Aligner :1990s - An early DUV scanner. 10 Aug 2017
Canon - FPA-3000 EX4 Aligner Canon - FPA-3000 EX4 Aligner :1990s 10 Aug 2017
Canon - Model FPA141 Project ... Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answer to the thr ... 30 Jun 1985 01 Aug 2017
Canon - PLA 501F/FA Proximit ... Proximity aligners were a bridge tool between the original contact aligners and projection aligner ... 30 Jun 1975 31 Jul 2017
Fairchild
First Monolithic Silicon IC ... 1961: First Monolithic Silicon IC Chip. Invented by Robert Noyce, Fairchild 30 Jun 1955 31 Aug 2017
Fairchild Systems Technology ... Possibly the 1st high speed, high pin count, LSI Test System. 30 Jun 1975 16 May 2018
Fairchild Instrumentation Mo ... This key piece of equipment was the granddaddy of most modern IC test systems and was the workhors ... 30 Jun 1965 31 Aug 2017
1st diffusion transistors Fairchild lead the industry from mesa-transistors to diffusion using Jean Hoerni's planar process, ... 30 Jun 1955 31 Jul 2017
  Lessons Learned at Fairchild ... Jim Bowen talks about how he took Fairchild Test Systems Group from a money loser to the world's l ... 18 Jan 2006 31 Jul 2017
  Building Fairchild Test Syst ... Jim Bowen talks about how he took Fairchild Test Systems Group from a money loser to the world's l ... 12 Jan 2006 31 Jul 2017
  The Turn Around at Fairchild ... Jim Bowen talks about how he took Fairchild Test Systems Group from a money loser to the world's l ... 05 Jan 2006 31 Jul 2017
GCA
  Bill Tobey on the Wafer Step ... The stepper was one of the most important tools that would propel Moore's Law forward for decades. ... 13 Dec 2006 07 Sep 2017
GCA - Model 8000 DSW Wafer S ... To stay ahead of your competition in the world of one micron production and the 1Mbit DRAM you nee ... 31 Aug 2017
GCA XLS - Advanced Microlith ... The failure that was supposed to save the U.S. lithography infrastructure. It was simply a case of ... 28 Aug 2017
GCA - 8500 Series Ion Implan ... VIBRATRAC, GCA's new fully automatic production end station, is the result of a two and one-half y ... 28 Aug 2017
  Bill Tobey on his Bob Graham ... Bill Tobey on his 2006 Bob Graham Award and Lessons Learned 06 Dec 2006 31 Jul 2017
GCA - Wafertrac® Resist P ... Remember air track? It was all the rage in the days when technocool won out over particle counts. ... 30 Jun 1975 31 Jul 2017
GCA - Mann 4800 Direct Step ... It broke the 1 micron CD barrier. 30 Jun 1975 31 Jul 2017
GCA - The Mann 3600 Photo Re ... Here is the Mann and the man that together started two revolutions in the semiconductor capital eq ... 30 Jun 1975 31 Jul 2017
IBM
  Power/Performance in ICs: Wh ... IBM’s Robert H. Dennard made two of the most revolutionary contributions to the semiconduct ... 15 Nov 1966 14 Nov 2019
IBM’s R&D Partnering ... The Chip Insider's Cook’s Tour: A deep immersion course in what IBM was doing in 2008 at bo ... 10 Jan 2008 08 May 2018
  Gary Patton: What Math & Sci ... Gary Patton never knew he wanted to be a scientist when he was a kid. 22 Oct 2019
Maskless Lithography: Circa ... IBM’s EL-1: a milestone in e-beam lithography 10 Nov 1977 03 Sep 2018
IBM’s development of ... IBM was first with copper interconnect for semiconductors. It marked the successful culmination of ... 22 Sep 1997 25 Jul 2018
Intel
  Andy Grove on the Evolution ... Andrew S. Grove addresses the evolution of semiconductor manufacturing from the earliest days at F ... 22 Mar 2005 31 Jul 2017
  Yan Borodovsky: Breaking the ... Ever wonder how innovation really happens? Think it's someone sitting back and dreaming up an idea ... 13 Sep 2007 22 Oct 2019
  Striking the Right Balance B ... William Holt: Striking the Right Balance Between Manufacturing Costs and Design Features 07 Feb 2006 08 Feb 2019
Andy Grove as an Industry Ch ... How Andy changed our industry in fundamental ways. 21 Mar 2016 04 Aug 2018
Tribute to Paul Otellini Paul Otellini was the first to pass from the semiconductor industry’s second generation of ... 02 Oct 2017 02 Aug 2018
Intel'™s CEO History Intel: 50 Years of Leadership 25 Jul 2018 25 Jul 2018
Intel’s Founding Stra ... These strategies were what made Intel so successful. 18 Jul 1968 25 Jul 2018
Intel's Founding The story of the birth of Intel 11 May 1968 25 Jul 2018
  Decision Making at Intel Bill Holt on Business Incentives for Semiconductor R&D 21 Jan 2008 05 Jul 2018
Bunny Suit History in Semico ... In 1968, standard clean room practices were lax. Facilities were kept reasonably clean, but employ ... 24 May 2018 24 May 2018
Intel’s First Product Intel introduces its first product: The 3101 SRAM with this press release. It was part of Mooreâ ... 15 Aug 1969 24 May 2018
  Intel 2003 Anniversary video Gordon Moore and Andy Grove talk about Intel’s history. 15 May 2018
Inside Intel’s Microp ... Inside Intel’s Microprocessor’s covers a pictorial and spec history from their first ... 08 May 2018
  Intel's R&D Pipeline The history of semiconductor research at Intel is discussed in this 2004 conversation with Sunlin ... 05 Oct 2004 08 May 2018
Intel's Manufacturing Advant ... Intel's Overlooked Advantage: A Case Study in Why Manufacturing Matters 03 Jul 1997 08 May 2018
Intel 1997 Important events and trends were in 1997 for the semiconductor industry 27 Jun 1997 08 May 2018
Intel's 35th Anniversary His ... Starting a silicon revolution, also known as the “Fairchild Brain Drain,” Bob Noyce an ... 18 Jul 2003 08 May 2018
  Yan Borodovsky on DFM and Co ... Yan Borodovsky discusses DFM and Computational Lithography at Intel in historic 2007 interview. He ... 13 Sep 2007 12 Feb 2018
  Yan Borodovsky with a demons ... Yan Borodovsky demonstrates what was new in DFM and Computational Lithography at Intel in this his ... 19 Sep 2007 12 Feb 2018
  Chiang Yang on What’s ... Intel's Chiang Yang talks about what's new in photomask technology and how Intel Mask Operation (I ... 18 Oct 2006 12 Feb 2018
  Kumud Srinivasan on Fab Auto ... Kumud Srinivasan, Director of Fab Automation, Intel discusses the status of Semiconductor Fab Auto ... 04 Jun 2004 12 Feb 2018
  An Intel Wafer Fab Cleanroom ... This video shows what it was like to work in a state-of-art fab during the late seventies to early ... 02 Jun 1980 30 Dec 2017
  Semiconductor wafer fab tour ... Go inside a 200mm fab at Intel's Fab 17 Hudson, Massachusetts factory as it existed around 2000. 15 Jun 2000 30 Dec 2017
Intel tackles Mobile with Ce ... The launch of Intel’s Centrino in 2003 marks move that took laptop PCs into the mobile worl ... 12 Mar 2003 14 Oct 2017
  Sean Maloney: Dynamic Duo Sean Maloney, who heads up Intel’s Mobility Group, talks about its new duo, 65 nanometer, a ... 31 Aug 2017
  American Competitiveness Craig Barrett, Chairman of Intel, describes why America is losing its edge and what needs to be do ... 10 May 2006 31 Aug 2017
Environmental Health and Saf ... The semiconductor industry has always worked hard to have and to maintain extremely high health an ... 15 Sep 1994 28 Aug 2017
  Intel 300mm Wafer Fab 11X Ci ... This video is a manufacturing IT case study that shows Intel's first true 300mm manufacturing fab ... 01 Jun 2004 22 Aug 2017
  Craig Barrett: How Intel Reb ... Craig describes the origins of manufacturing lore such as Copy Exactly, Intel U, and refsnart in t ... 04 May 2006 31 Jul 2017
  Andy Grove on the developmen ... Andy Grove talks at IMEC 2004 - the Intel Manufacturing Excellence Conference - about the history ... 15 Jun 2004 31 Jul 2017
Intel - 8008 CPU 8008- 8 bit parallel central proccessing unit. 30 Jun 1975 31 Jul 2017
  Math, Science, & Your Future Sound Boring? Hear how very successful people have used Math & Science to make their lives wild, f ... 27 Apr 2006 24 Jul 2017
KLA-Tencor
KLA Conquers Phase Shift Ins ... Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Pha ... 20 May 1991 06 Sep 2018
KLA Conquers the Pellicle Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turnin ... 16 Nov 1981 06 Sep 2018
KLA lays out Yield Managemen ... This technical paper laid out the future of yield management, covering all the issues the industry ... 01 Jun 1981 06 Sep 2018
KLA 200 Series Reticle Inspe ... KLA's Reticle Inspection System was the first automatic inspection system to ensure that killer de ... 15 Jun 1984 02 Mar 2018
KLA-Tencor - KLA ADD/100 Ser ... The dawn of automated inspection. KLA's mask inspection tools took over to see what humans could n ... 01 Jan 1980 23 Sep 2017
KLA-Tencor - KLA 2020 The tool that sparked the yield management revolution. 30 Jun 1985 01 Aug 2017
Tencor at 20 Years Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment indust ... 24 Jul 2017
Lam Research
Lam Research AutoEtch 480 Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. 15 Jul 1981 14 May 2018
Lam Research: the Early Year ... One of the most celebrated companies in the equipment industry, Lam was once a scrappy start-up ta ... 30 Jun 1985 28 Aug 2017
Excerpt from 1999 Annual Rep ... Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to ... 28 Aug 2017
Excerpt from 1984 Annual Rep ... Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology prod ... 28 Aug 2017
Auto Etch 590 Oxide Etcher The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the g ... 28 Aug 2017
Nikon
Nikon - NSR-2205i11D Step-an ... The state-of-the-art workhorse for 0.35 micron. 19 Sep 2017
Nikon - 25 Years of Innovati ... 25 Years of Nikon Innovation traces the history of Nikon steppers from 1980 through 2005. 31 Aug 2017
Nikon - NSR 1755EX8A Step-an ... An early excimer laser stepper for 0.45 micron. 30 Jun 1995 31 Aug 2017
Nikon - NSR Series Steppers The series that launched a thousand careers. The NSR series would become the chip maker’s m ... 28 Aug 2017
Nikon - NSR 2005 i10C/i9C i- ... Nikon Step-and_Repeat Systems NSR-205i10c/i9c 28 Aug 2017
Nikon - NSR-1505G2A stepper The NSR-1505G2A is equipped with a new higher-resolution reduction projection lens that has a grea ... 28 Aug 2017
SEMI
SEMICON Conceived SEMI's Great Moments in Semiconductor History: The conception of the SEMICON trade show in 1970 is ... 01 Jan 1970 21 Oct 2019
  Art Zafiropoulo and his 2000 ... Art Zafiropoulo was honored for championing technology through innovative marketing approaches: fi ... 29 Nov 2004 21 Oct 2019
  The Bob Graham Award What About Bob - Robert Graham's video biography of his career with comments about him, sometimes ... 29 Nov 2004 21 Oct 2019
  Jim Healy and his 2001 award ... Jim Healy was honored for the establishment of industry specific selling processes in test. Jim wr ... 29 Nov 2004 21 Oct 2019
  Barry Rapozo and his 2001 aw ... Barry Rapozo was honored for the establishment of selling processes in wafer fab. He identified an ... 29 Nov 2004 21 Oct 2019
  Jerry Hutcheson and his 2002 ... Jerry Hutcheson was honored for pioneering and developing relational databases on the equipment in ... 29 Nov 2004 21 Oct 2019
  2002: Ed Segal Ed Segal was honored for his establishment of a global representative organization that made it po ... 29 Nov 2004 21 Oct 2019
  2003: Steve Nakayama Steve Nakayama honored for his contribution in helping globalize the semiconductor equipment indus ... 29 Nov 2004 21 Oct 2019
  International Standards and ... A conversation with Robert N. Noyce and Karel Urbanek 15 Jun 1990 21 Oct 2019
Silicon Valley Genealogy AMD's and Intel's can be traced back to Fairchild and Shockley Transistor with this genealogy of s ... 21 Oct 2019
Making Silicon Commercially ... SEMI's Great Moments in Semiconductor History: In the mid-1950s. Dr. Henry W. Gutsche (right), dev ... 15 Jun 1955 21 Oct 2019
Invention of the Integrated ... SEMI's Great Moments in Semiconductor History: Invention of the IC 28 Aug 1958 27 Aug 2019
1947-The Transistor is Disco ... SEMI's Great Moments in Semiconductor History: In 1947, Walter Brattain and John Bardeen, working ... 16 Dec 1947 23 Jul 2019
Reminiscences from SEMICON The industry was in its childhood? When two or three SEMICON trade shows covered the entire world? 15 Jul 1971 06 Sep 2018
Silicon Valley Group (Acquired by ASML)
Silicon Valley Group - Micra ... Introducing Micrascan III+ for Critical Level Lithography 31 Aug 2017
Silicon Valley Group - Micra ... Significant improvement in manufacturing worthiness for the first Step-and-Scan series. 31 Aug 2017
Silicon Valley Group - ProCe ... Silicon Valley Group - ProCell Track System - 200/300mm System Specifications 29 Aug 2017
Silicon Valley Group - Model ... Silicon Valley Group - Model 8800 ATS Track (Arm Transport System) 29 Aug 2017
Silicon Valley Group - 90 Se ... Silicon Valley Group - 90 Series Resist Processing - High Productivity photo processing 29 Aug 2017
TEL
Tetsuo (Tom) Tsuneishi - HoF Tetsuo (Tom) Tsuneishi for providing the strategic vision behind Tokyo Electron’s successfu ... 04 Dec 2018
Terry Higashi - HoF Terry Higashi navigated TEL through the toughest times the Equipment Industry has ever seen, all t ... 04 Dec 2018
  Tokyo Electron's History thr ... TEL's history and philosophy of serving semiconductor manufacturers 15 Jun 2003 05 Jul 2018
TEL - Clean Track Mark II TEL's Clean Track Photoresist Processing System 01 Jan 1992 05 Jul 2018
TEL - Line Card TEL's semiconductor production equipments meet the need of the age of VLSI. 11 Sep 2017
TEL - Model TMC 4400-A Wafer ... If this photo looks a bit ghostly that’s because it is. We have no surviving photos of the ... 30 Jun 1985 01 Aug 2017
Teradyne
  Alex d'Arbeloff on Teradyne' ... How Teradyne got started and what it was like to be a start-up in the sixties. 23 May 2006 12 Feb 2018
The Father of ATE (Automatic ... One of our industry legends, Nick DeWolf, has passed on. DeWolf co-founded Teradyne with Alex d'A ... 15 Jul 2017 02 Dec 2019
  Alex d'Arbeloff on Lessons L ... Alex d'Arbeloff's essential rules for running a semiconductor equipment company 07 Jun 2006 12 Feb 2018
  Alex d'Arbeloff on Teradyne' ... Alex describes the second phase of Teradyne history and how they built the company into an industr ... 01 Jun 2006 12 Feb 2018
Teradyne J259 IC Test System This famous test system was the first truly computer-controlled IC test system. 01 Jun 1966 01 Dec 2017
Teradyne - J973 VLSI Test Sy ... Teradyne - J973 VLSI Test System 11 Sep 2017
Ultratech (Formerly Ultratech Stepper)
  Dave Markle: Ultratech/Perki ... Dave Markle, Senior Vice President & Chief Technical Officer at Ultratech, describes what math and ... 22 Oct 2019
Ultratech Stepper - Saturn S ... Saturn wafer stepper Advancing Mix-and-Match Lithography 13 Sep 2017
Ultratech - Positive Resist ... Ultratech - Positive Resist Develop/Rinse Station Model 504 - For automatic batch developing and r ... 13 Sep 2017
Ultratech - Positive Photore ... Ultratech - Positive Photoresist Develop Station Model 503 13 Sep 2017
Ultratech - Model 504 Resist ... Ultratech - Model 504 Resist Develop/Rinse System - Positive photo resist Develop / Rinse Station ... 13 Sep 2017
Ultratech Stepper - Model 90 ... Ultratech Stepper - Model 900 H/G Line stepper - Versatile, Adaptable, Flexible 11 Sep 2017
Ultratech - Pellicle Equipme ... Ultratech - Pellicle Equipment and Accessories - To implement the use of pellicle protected masks ... 11 Sep 2017

Other Important

a-c
AAI Series 1000 Automatic Te ... This logic tester represented another early attempt at capturing the automatic test equipment mark ... 30 Jun 1965 08 May 2018
Accelerators Inc.- 400 Serie ... This photo from the AI 400 series high energy implanters is one of the earliest decent photos from ... 30 Jun 1975 31 Jul 2017
Accutest - 103A Watch Circui ... Watch circuit test system 193A 10 Aug 2017
ADAR - MX-17 LSI Test System MX-17 LSI Test System by Adar Associates, Inc... 30 Jun 1975 31 Jul 2017
ADAR - Doctor, Memory Tester Adar Doctor 32 RAM/ROM Memory Tester..... 30 Jun 1975 31 Jul 2017
AMD - Automated Precision Ma ... This video describes one of the most important factors in how AMD surged ahead to become a world l ... 15 May 2018
  Tom Sonderman on Automated P ... Thomas Sonderman discusses Automated Precision Manufacturing and how it allows AMD to compete effe ... 29 Mar 2004 08 May 2018
AMI - Series 2000, 2nd Op St ... The AMI Model 2100 is an excellent representative of Second Optical Inspection systems, or 2nd Op, ... 30 Jun 1985 31 Jul 2017
Anelva - MBE 831 Molecular B ... Anelva - MBE 831 Molecular Beam Epitaxy System :1985-89 10 Aug 2017
Apple’s iFolly: prici ... Apple's first iPhone pricing gaff of having to take a $200 haircut from its original retail price ... 21 Sep 2007 02 Mar 2018
APT - 9155 E-Beam Resist Pro ... APT - 9155 E-Beam Resist Processor :1985-89 31 Aug 2017
  Lessons Learned Mihir Parikh tells us about the big Automation Do's and Don'ts 21 Aug 2008 22 Oct 2019
  Mihir on the History of Auto ... Mihir on the History of Automation in the Semiconductor Industry 13 Aug 2008 22 Oct 2019
ASET - Model 1562 g-Line Ste ... ASET - Model 1562 g-Line Stepper :1985-89 - Once a leader, they died after Japan’s onslaugh ... 31 Aug 2017
ASM Assembly Automation - PF ... Here are two fine examples of third optical inspection systems when such systems were at their zen ... 30 Jun 1985 31 Jul 2017
ASM/Lawton - Encapsulation P ... ASM/Lawton - Encapsulation Press :1970s - Helped make all those plastic DIP packages possible. 31 Aug 2017
Asyst - SMIF System Back in the early eighties people dressed up in hot, humid and extremely uncomfortable Bunny Suits ... 30 Jun 1995 01 Aug 2017
History of Ion Implantation History of Ion Implantation Systems and their importance in the development of semiconductor manuf ... 15 Jun 1980 26 Oct 2017
BTU - Bruce Diffusion Furnac ... BTU - Bruce Diffusion Furnaces :1980-84 - A Real Workhorse from the Early Days. 10 Aug 2017
Cambridge Instruments - EBML ... Cambridge Instruments - EBML 300 :1985-89 - Maskless Lithography from twenty years ago. 10 Aug 2017
Cameca - XPWS 301 Proximity ... Cameca - XPWS 301 Proximity Step and Repeat System :1980-84 - Thompson’s x-ray spin-off. 31 Aug 2017
Cameca - 600 Series Steppers Cameca - 600 Series Steppers :1980-84 10 Aug 2017
Cameca - ARW Aligner Repeate ... Cameca was a European based attempt from the research department of Thomson CSF to penetrate the n ... 30 Jun 1985 01 Aug 2017
Cammax Precima - PRS14E Phot ... Cammax Precima - PRS14E Photoresist Spinner :1990s 31 Aug 2017
Censor - SRA-100 Mask Aligne ... Censor - SRA-100 Mask Aligner :1970s - Backed by Porsche and Gordon Moore and it still went wrong. 10 Aug 2017
Chuo Riken - Resist Processi ... Chuo Riken - Resist Processing Equipment : 10 Jul 2017
Cobilt - Autofab, Inline Res ... Cobilt - Autofab, Inline Resist Processing System 15 Jun 1974 05 Jul 2018
Cobilt - Model AF110 Brushle ... Cobilt - Model AF110 Brushless Scrubber :1980-84 31 Aug 2017
CONVAC - Modul 2000 series CONVAC compact equipment is derived from fully developed components of Module 2000 Series with pro ... 31 Aug 2017
CONVAC - Photo Mask Processi ... CONVAC Photo mask processing equipment 10 Aug 2017
CONVAC - Modul 6000 series CONVAC Module 6000 Series photo-lithographic process equipment meets the most stringent requiremen ... 10 Aug 2017
CONVAC - APTCON 3000 Modular ... The APTCON 3000 is a modular spin processing system designed by APT and CONVAC, the worlds leading ... 10 Aug 2017
d-f
  Anantha Sethuraman: Copper I ... In 1998, IBM and Novellus caught the world off-guard when they announced they were ready for coppe ... 22 Oct 2019
Drytek - DRIE 100 Plasma Etc ... The Drytek DRIE 100 plasma etcher was the template for all cluster tools that would follow. 30 Jun 1985 11 Mar 2020
Model IS-4 2nd Op Inspection ... Here is another excellent example of an early Second Optical Inspection Station representative of ... 30 Jun 1985 01 Aug 2017
DW Industries Vacuum Deposit ... During many of the early years, in a little shop on Arques Avenue in Sunnyvale, California, Davis ... 30 Jun 1965 31 Jul 2017
Eaton - Optimetrix 8000 Seri ... From the West Coast’s premier, but now dead, stepper company. 11 Aug 2017
Eaton - LSI Series Wafer Pro ... The Eaton LSI Series has features and performance to solve today's toughest wafer processing probl ... 10 Aug 2017
  Eaton's Semiconductor Equipm ... Eaton's Semiconductor Foray, a case study. It was supposed to be the semiconductor equipment compa ... 25 Oct 2006 31 Jul 2017
Edwards - Thin Film Depositi ... Versatile Systems For Thin Film Deposition 11 Aug 2017
Electroglas - Model 3001 Waf ... Electroglas - Model 3001 Wafer Prober System :1990s 11 Aug 2017
Electroglas Model 131B Motor ... The elegant simplicity of this small machine belies the fact that an earlier ancestor was the gran ... 30 Jun 1965 31 Jul 2017
Electromask - 700SLR Stepper Arguably the best stepper of its day, based on resale values. 30 Jun 1975 31 Aug 2017
Electronic Visions - EV150 R ... Electronic Visions - EV150 Resist Processing System :1990s 11 Aug 2017
ESEC Group Products ESEC is a leading supplier of system solutions and technologies for its business partners in silic ... 31 Dec 1969 11 Aug 2017
The 1st Cleanroom The cleanroom was invented in the early 1960s by Willis Whitfield, while working at Sandia Nationa ... 24 Nov 1964 11 Feb 2020
FSI - Polaris, Coating Systm FSI - Polaris, Coating System :1990s 14 Aug 2017
FSI - 8251 Clean Machine The 8251 single cassette, horizontal, on-center clean machine features the high quality and rugged ... 14 Aug 2017
Fusion - MICROLITE Series 15 ... Microlite 150 Series Photostabilizer Systems provide a clean one-step process for hardening of pho ... 31 Aug 2017
Fusion - UV Gemini Photostab ... Gemini-The Platform of Excellence for Photoresist Processing 28 Aug 2017
Fusion - Dual Chamber Photos ... Dual Chamber Photostabilizer 28 Aug 2017
Fusion - 200 PCU Photostabil ... The 200PCU Photostabilizer utilizes the standard dual unicassette wafer handling platform. 14 Aug 2017
g-i
Gasonics - HiPOX System Possibly the only successful high pressure system. 30 Jun 1975 31 Jul 2017
Genus - 8720 Tungsten CVD Sy ... This system, from about 1988, represents one of the most successful tungsten deposition systems. 30 Jun 1985 01 Aug 2017
Genus - 1510 MeV Ion Implant ... High-energy ion implanters, typically in the range of 1 to 3 MEV, were originally looked at in the ... 30 Jun 1985 01 Aug 2017
GS Blue M Electric Blue M Class A batch ovens are mechanical convection electric chambers that include safety feature ... 31 Aug 2017
Hampshire - Series 3500 X-Ra ... X-Ray Exposure technology has long been said to be the technology of tomorrow. That was as true in ... 30 Jun 1995 01 Aug 2017
Headway Research - R & D Spi ... R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is for both the 200 ... 28 Aug 2017
Headway Research - LS22 Spin ... The LS22 Series of large substrate spinners is designed for versatility, ease of use and safety in ... 28 Aug 2017
High Voltage Engineering - M ... High Voltage Engineering shipped the first commercial Ion Implanter, built in 1965 by Peter Rose. ... 28 Aug 2017
Dawn of the CD SEM The Dawn of the CD SEM came with Hitachi’s (now Hitachi High-Technologies) add-on accessory ... 18 Jun 1985 26 Jul 2019
Hitachi - RA-101HL & RA501HL ... Rare captively made stepper with a Minolta Lens. 28 Aug 2017
Hitachi - HL-700, E-beam Lit ... Rare captively made e-beam system that would break out into the commercial world. 28 Aug 2017
IMS - Ion Beam Exposure Tool The push for sub-micron line features sprouted several experimental attempts, among them X-Ray, e- ... 30 Jun 1985 01 Aug 2017
Integrated Technologies - P ... The model P 3201 is a low cost, highly efficient dip coating system customarily used in applying p ... 28 Aug 2017
Irie Seisakusho - Spin Drier Irie Seisakusho - Spin Drier 28 Aug 2017
j-l
JEOL - JBX-6A Electron Beam ... A 6th gen maskless litho tool from the early 80's. 30 Jun 1985 01 Aug 2017
JSR - Plasmaster-Si, Silylat ... Plasmaster-Si is a silylation track specially dedicated to the Desire process. 28 Aug 2017
ACS200 Lithography Cluster The SUSS ACS200 Microlithography Cluster offers superior process performance and unsurpassed produ ... 31 Aug 2017
RC8-RC33 Spin Coaters: 1990s SUSS spin coaters combine state of the art technology with an innovative concept. 28 Aug 2017
Karl Suss - LSX10 X-Ray Expo ... The Karl Suss company was one of the first companies to explore commercial X-Ray exposure systems. 30 Jun 1985 01 Aug 2017
Uniplane System 4000 High Pr ... The versatile programmability of Kasper's System 4000 High Pressure Scrubber allows semiconductor ... 28 Aug 2017
How KLA has keeps moving the ... Few companies have accelerated the industry as much as KLA has. 24 May 2019 24 May 2019
  Kulicke & Soffa - Wire Bondi ... Ever wonder how the nanochips you see in pictures wind up covered in plastic on a printed circuit ... 28 Aug 2017
Kulicke & Soffa - Model 1471 ... Kulicke & Soffa Model 1471 High Productivity Wedge Bonder 28 Aug 2017
  KULICKE & SOFFA - 50th Anniv ... KULICKE & SOFFA - 50th Anniversary 28 Aug 2017
LASA Industries - Prototype, ... Here is the first true lights-out-fab. Since the beginning of the industry the dream was to have a ... 30 Jun 1985 31 Aug 2017
Lasarray - DWL 2.0, Laser St ... The DWL 2.0 has been designed with a modular concept in order to ensure maximum up-time and to fac ... 28 Aug 2017
Leica - VB 5/6 and ZBA 31H/3 ... The child of the legendary Cambridge maskless systems. 28 Aug 2017
Leybold - Heraus-Vertical In ... An early disk coating system 28 Aug 2017
Leybold - Heraus-4 inch CZ c ... You have to make capital investment decision to secure availability of monocrystalline silicon of ... 28 Aug 2017
LFE Corporation - 501 Chrome ... Not the first such system, but near the first. 30 Jun 1975 05 Jul 2018
Lintott - Early Ion Implante ... One of the first commercial high current ion implanters. 30 Jun 1975 31 Jul 2017
m-o
Macrodata - MD100 Test Syste ... This little bench-top tester was a real Mighty Mouse© as the sixties ended and the seventies be ... 30 Jun 1975 31 Jul 2017
Microair - laminar flow clea ... Suspended vertical laminar flow stations from Micro Air fulfill a variety of needs where clean air ... 28 Aug 2017
Micronix - MX-15 X-Ray Litho ... The first commercial American X-ray lithography system. 30 Jun 1985 01 Aug 2017
MRC - Series 900 In-Line Spu ... The semiconductor industry was plunging rapidly into alloy deposition to overcome many separate pr ... 30 Jun 1975 31 Jul 2017
MTI - Model 6300 Scrubber Model 6300C, 6301C(SEE ALSO MODEL 6300 & 6302 DATA SHEET) SUPER SCRUBBER WAFER CLEANERS... to elim ... 31 Aug 2017
MTI - Omnichuck OmniChuck Advanced Wafer Processing System 28 Aug 2017
MTI - MultiFab System Overvi ... MultiFab's modular design provides easy reconfiguration, maintenance and repair. 28 Aug 2017
Muhlbauer - VideoSem, Die Bo ... The VideoSem 2010 is a fully automatic vision system for die bond inspection. 28 Aug 2017
Nippon Seiko - TZ-310 Exposu ... TZ-310 Multi-Function System for Semiconductor Production 29 Aug 2017
  Silicon Valley Alternatve En ... This video documents the Silicon Valley Alternative Energy Summit, where over 85 CEOs and local po ... 29 Aug 2017
  Novellus - Copper This ignited the Copper Revolution 29 Aug 2017
Novellus - Concept One CVD D ... This photo shows a descendant of the first Concept One, almost a decade after its original develop ... 30 Jun 1985 01 Aug 2017
Optical Associates - DUV 40K ... Deep UV 40KX ULTRACURE Photoresist Stabilization Sytsem 29 Aug 2017
p-r
Pacific Western - Model 560 ... For years the Coyote held a favored spot among users as the best little CVD system around. 30 Jun 1985 01 Aug 2017
Pacific Western - The Probe ... A little system that was to become one of the most favored probers on the west coast was manufactu ... 30 Jun 1965 31 Jul 2017
Perkin Elmer - Photo Gallery This photo gallery represents a salute to Perkin-Elmer. Though perhaps more well-known as the make ... 31 Aug 2017
Perkin-Elmer - Micralign 600 A pinnacle technically, it was also the end of the road for projection aligners. 31 Aug 2017
Perkin-Elmer - MEBES Pattern ... It only took 196M Bytes of disk storage for masks in 1983, but hasn’t changed is the 24 hou ... 31 Aug 2017
Perkin Elmer - Micralign Pro ... The Intel secret weapon that turned the industry upside-down and revolutionized lithography. 30 Jun 1975 01 Aug 2017
RVSI - WS-1000 Bumped Wafer ... High Throughput Bumped Wafer Characterization System 31 Dec 1969 29 Aug 2017
s-u
Screen - The P210 Wet Proces ... When I first visited this company in the early seventies, it was known as Dainippon Screen. 30 Jun 1985 01 Aug 2017
  SEMATECH - An Oral History An interview with Dave Anderson 16 Jun 1992 30 Dec 2017
  How the SIA Got Started How the SIA got started is an video interview with the legendary Wilf Corrigan who was there when ... 16 May 2007 23 Mar 2018
  The Development of the ASIC ... In this segment, Wilf Corrigan details the structural ingredients of the ASIC semiconductor busine ... 24 May 2007 22 Oct 2019
  The Lessons He Learned and W ... In this segment, learn from Wilf why learning the fundamentals are so important and what you most ... 30 May 2007 22 Oct 2019
Semiconductor Industry Assoc ... The Semiconductor Industry Association (SIA) was founded in April 1977. The article by Ron Iscoff ... 31 Dec 1969 29 Aug 2017
  SRC 25th Anniversary The history and accomplishments of the Semiconductor Research Corporation 01 Jun 2007 22 Oct 2019
Semiconductor Systems - 8050 ... The 8050 yields consistent, repeatable wafer-to-wafer results, providing maximum throughput within ... 31 Aug 2017
Semiconductor Systems - Syst ... Semiconductor Systems' new System 200 is state-of-the-art equipment for submicron lithography that ... 29 Aug 2017
Semiconductor System - 150 L ... System 150 is the intelligent solution for successful submicron process control. Semiconductor Sys ... 29 Aug 2017
Semitool - Developer/Strippe ... Semitool's history of engineering excellence includes the creation of the first horizontal on-axis ... 29 Aug 2017
SET - TP6000 Spinner The TP 6000 model has been designed and developed according to a very modular concept which make i ... 31 Aug 2017
SET - TP6050 GYRSET Spinner The SET's Answer To Your Photoresist Coating Problems 29 Aug 2017
SET - MA 750 Mask Aligner A common example of how low barriers to entry were. 29 Aug 2017
Setek - MS-610 Series Resist ... Setek - MS-610 Series Resist Processing 07 Jul 2017
Shinkawa - SWB-FA-UTC-40 Wir ... Well known in the U.S. as a Marubeni import, Shinkawa’s wire bonders had also been recogniz ... 30 Jun 1985 01 Aug 2017
Solitec - 800 Series Automat ... Solitec's commitment to quality automation delivers results 29 Aug 2017
Solitec - 1111-TD Constant T ... As semiconductor geometry device continues to shring, positive resist systems are becoming increas ... 29 Aug 2017
Sumitomo Heavy Industries - ... A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential par ... 31 Aug 2017
Tazmo - Spin Coater TR6000 a ... Tazmo - Spin Coater TR6000 and TR5000 Series 29 Aug 2017
Technics - PE II-A Planar Et ... The new approach to etching and deposition: The PlanarEtch ||A Plasma systems from technics 29 Aug 2017
Tegal - Plasma Inline 700 Si ... What the cutting edge of etching looked like in 1980 30 Jun 1985 01 Aug 2017
Tempress - DDC Diffusion fur ... Tempress - A unit of general signal - DDC Diffusion furnace 13 Sep 2017
Tempress - Model 216 Pyrox R ... You might think that some of the early glass deposition systems looked like grandma’s high- ... 30 Jun 1975 31 Jul 2017
Thermco Diffusion Furnace Here is an excellent view of a state-of-the-art diffusion furnace from the mid 1960s. 30 Jun 1965 31 Jul 2017
Toshiba - Space Linear Magne ... Toshibas advanced control technique created this highly innovative system 13 Sep 2017
Transistor Automation - Mode ... Here is a workhorse of the early industry, the Teledyne TAC model XY540 wafer prober. An improved ... 30 Jun 1975 19 Sep 2017
TRE - 800SLR Wafer Stepper The fully automatic TRE - 800SLR Wafer Stepper 11 Sep 2017
TSMC Founded - The First Pur ... Semiconductor History being made in the 1980’s The founding of TSMC on February 21, 1987 ... 21 Feb 1987 14 Sep 2017
Tylan - Baking System Tylan - Baking System 06 Jul 2017
Ultratech’s History Founded in 1979 as Ultratech Stepper, it was the oldest stepper company in the world until its sal ... 29 Sep 2017 26 Oct 2017
v-x
Varian - 3280 Cassette-to-Ca ... The time was the early eighties. Change for semiconductor equipment was in the air, you could almo ... 13 Sep 2017
Varian - VLS 1000 Electron B ... Remember when Varian was in the lithography business? You dont? Well, this was one of the top e-be ... 30 Jun 1985 11 Sep 2017
Varian - Vacuum/Coater varian 3135 Vacuum/Coater System 11 Sep 2017
Varian - The MBE GEN II - M ... Not many commercial machines get more exotic than this. It even looks like something out of StarTr ... 30 Jun 1985 01 Aug 2017
Mix & Match Photoresist Proc ... In the early eighties virtually every company was seeking entry into the equipment business, or ex ... 30 Jun 1985 11 Sep 2017
Veeco - Flexible Automated W ... Veeco - Flexible Automated Wafer Fab System - Increased productivity, Improve yields , reduce inve ... 11 Sep 2017
Veeco - ai Model 2100 Ion Im ... Accelerators Inc was one of the three or four early implementers of ion implanters. The company wa ... 30 Jun 1975 31 Jul 2017
Verigy - (HP) 93000 Today the company is known as Verigy and they are considered a powerhouse of semiconductor Automat ... 30 Jun 1995 31 Aug 2017
Verteq - Ultraclean High Pur ... Verteq - Ultraclean High Purity Megasonic System offers the same superior cleaning performance and ... 13 Sep 2017
Westech - Model 372 Wafer Po ... They had the world on a string and were sitting on a rainbow, but had no idea of what a customer w ... 30 Jun 1985 01 Aug 2017
X-TEK - HMX Xray Inspection ... HMX Xray Inspection System : A high performance system for general non-destructive testing 06 Oct 2017

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