High Voltage Engineering - Megavolt Ion Implantation Systems

Summary : High Voltage Engineering shipped the first commercial Ion Implanter, built in 1965 by Peter Rose. But it was not a Megavolt System such as depicted here.

High Voltage Engineering shipped the first commercial Ion Implanter, built in 1965 by Peter Rose. But it was not a Megavolt System such as depicted here. That took almost two more decades and a lot of research. Through it all, the company went on to establish practically the earliest true megavolt systems in the 1 and 2 MEV range. For several more years it remained the main source of these tools, which were to become critical for producing buried layers.

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  • Key Contributors: To Be Recognized.
  • Industry code: 1455.00
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  • Mfr’s Code: Obsolete

 

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