Ultratech Stepper - Model 900 H/G Line stepper

Saturn wafer stepper Advancing Mix-and-Match Lithography

Dave Markle, Senior Vice President & Chief Technical Officer at Ultratech, descr ...

Ultratech - Pellicle Equipment and Accessories - To implement the use of pellicl ...

Ultratech - Positive Resist Develop/Rinse Station Model 504 - For automatic batc ...

Ultratech - Model 504 Resist Develop/Rinse System - Positive photo resist Develo ...

Ultratech - Positive Photoresist Develop Station Model 503

15 Jun 1974

Cobilt - Autofab, Inline Resist Processing System

30 Jun 1975

Arguably the best stepper of its day, based on resale values.

30 Jun 1975

Not the first such system, but near the first.

In 1998, IBM and Novellus caught the world off-guard when they announced they we ...