Chuo Riken - Resist Processing Equipment

Bunny Suit History in S ...

24 May 2018

In 1968, standard clean room practices were lax. Facilities were kept reasonably clean, but employees wore their own clothes and the environment was not sterile. An early technician remembered “a couple of pe ... See more

KLA 200 Series Reticle ...

15 Jun 1984

KLA's Reticle Inspection System was the first automatic inspection system to ensure that killer defects as small as 0.7 microns on both reticles and photomasks would be detected. ... See more

Canon - PLA 501F/FA Pro ...

30 Jun 1975

Proximity aligners were a bridge tool between the original contact aligners and projection aligners. Yield from contact aligners was extremely low, mainly because the mask was just a stencil laying over the pho ... See more

Lintott - Early Ion Imp ...

30 Jun 1975

One of the first commercial high current ion implanters. ... See more

Art Zafiropoulo and his ...

29 Nov 2004

Art Zafiropoulo was honored for championing technology through innovative marketing approaches: first with plasma etching and later with “mix and match” lithographic manufacturing strategies. ... See more

The Father of ATE (Auto ...

15 Jul 2017

One of our industry legends, Nick DeWolf, has passed on. DeWolf co-founded Teradyne with Alex d'Arbeloff, who together built our industrys ATE business. ... See more