Andrew S. Grove addresses the evolution of semiconductor manufacturing from the ...
Saturn wafer stepper Advancing Mix-and-Match Lithography
The semiconductor industry was plunging rapidly into alloy deposition to overcom ...
Here is an excellent view of a state-of-the-art diffusion furnace from the mid 1 ...
The Drytek DRIE 100 plasma etcher was the template for all cluster tools that wo ...
This ignited the Copper Revolution
Mihir on the History of Automation in the Semiconductor Industry
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An early disk coating system
Applied Materials - CA-800 Mask Aligner and Exposure System: :1980-84
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