Chuo Riken - Resist Processing Equipment

22 Mar 2005

Andrew S. Grove addresses the evolution of semiconductor manufacturing from the ...

Saturn wafer stepper Advancing Mix-and-Match Lithography

30 Jun 1975

The semiconductor industry was plunging rapidly into alloy deposition to overcom ...

30 Jun 1965

Here is an excellent view of a state-of-the-art diffusion furnace from the mid 1 ...

30 Jun 1985

The Drytek DRIE 100 plasma etcher was the template for all cluster tools that wo ...

This ignited the Copper Revolution

13 Aug 2008

Mihir on the History of Automation in the Semiconductor Industry

Ultratech - Pellicle Equipment and Accessories - To implement the use of pellicl ...

An early disk coating system

Applied Materials - CA-800 Mask Aligner and Exposure System: :1980-84