1961: First Monolithic Silicon IC Chip. Invented by Robert Noyce, Fairchild
Nikon Step-and_Repeat Systems NSR-205i10c/i9c
A conversation with Robert N. Noyce and Karel Urbanek
An early excimer laser stepper for 0.45 micron.
Introducing Micrascan III+ for Critical Level Lithography
Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answ ...
Applied Materials - Silox Model AMS 2600 & 2660 :1960s - An early tool for low t ...
Cammax Precima - PRS14E Photoresist Spinner :1990s
TZ-310 Multi-Function System for Semiconductor Production
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