Summary : The NSR-1505G2A is equipped with a new higher-resolution reduction projection lens that has a greater numeral aperture (N.A. = 0.35)
Nikon Step-and_Repeat Systems NSR-205i10c/i9c
The state-of-the-art workhorse for 0.35 micron.
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Chuo Riken - Resist Processing Equipment :
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