Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Here is an excellent view of a state-of-the-art diffusion furnace from the mid 1 ...
Remember air track? It was all the rage in the days when technocool won out ove ...
You might think that some of the early glass deposition systems looked like gran ...
SEMI's Great Moments in Semiconductor History: Invention of the IC
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