Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
The tool that sparked the yield management revolution.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
This technical paper laid out the future of yield management, covering all the i ...
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
Back in the early eighties people dressed up in hot, humid and extremely uncomfo ...
One of our industry legends, Nick DeWolf, has passed on. DeWolf co-founded Tera ...
Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answ ...
Sound Boring? Hear how very successful people have used Math & Science to make t ...
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