Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Gemini-The Platform of Excellence for Photoresist Processing
Significant improvement in manufacturing worthiness for the first Step-and-Scan ...
Gary Patton never knew he wanted to be a scientist when he was a kid.
ASET - Model 1562 g-Line Stepper :1985-89 - Once a leader, they died after Japan ...
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