KLA Conquers Phase Shift Inspection

Organization Name :KLA-TencorTime Period :1990'sRelevant Date :1991-05-20

Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.

Click here to view full screen

Tencor at 20 Years

Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more

In the News: Technology ...

01 Jun 1981

This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Publi ... See more

KLA 200 Series Reticle ...

15 Jun 1984

KLA's Reticle Inspection System was the first automatic inspection system to ensure that killer defects as small as 0.7 microns on both reticles and photomasks would be detected. ... See more

KLA-Tencor - KLA 2020

30 Jun 1985

The tool that sparked the yield management revolution. ... See more

KLA Conquers the Pellic ...

16 Nov 1981

Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to o ... See more

KLA-Tencor - KLA ADD/10 ...

01 Jan 1980

The dawn of automated inspection. KLA's mask inspection tools took over to see what humans could not, launching what would become a great company by pushing barriers aside. ... See more

Genus - 1510 MeV Ion Im ...

30 Jun 1985

High-energy ion implanters, typically in the range of 1 to 3 MEV, were originally looked at in the late seventies but were never too successful. ... See more

Building Fairchild Test ...

12 Jan 2006

Jim Bowen talks about how he took Fairchild Test Systems Group from a money loser to the world's largest semiconductor equipment company during the seventies and how mismanagement led to its destruction after h ... See more

Intel tackles Mobile wi ...

12 Mar 2003

The launch of Intel’s Centrino in 2003 marks move that took laptop PCs into the mobile world. It is often claimed that Intel was a failure in mobile. But consider that Intel’s profits of $11B in Otellini” ... See more

Cobilt - Model AF110 Br ...

Cobilt - Model AF110 Brushless Scrubber :1980-84 ... See more