Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
The tool that sparked the yield management revolution.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
This technical paper laid out the future of yield management, covering all the i ...
Technology, Circa 1981 – It's often the overlooked news that turn out to ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Just as the first lights of a new millennium were dawning in 1999, ASML announce ...
Jim Bowen talks about how he took Fairchild Test Systems Group from a money lose ...
This photo from the AI 400 series high energy implanters is one of the earliest ...
IBM’s R&D partnering model is one of the great business process innovations of ...
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