Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
The Intel secret weapon that turned the industry upside-down and revolutionized ...
The semiconductor industry was plunging rapidly into alloy deposition to overcom ...
An early excimer laser stepper for 0.45 micron.
The failure that was supposed to save the U.S. lithography infrastructure. It wa ...
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