Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
The tool that sparked the yield management revolution.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
This technical paper laid out the future of yield management, covering all the i ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
Technology, Circa 1981 – It's often the overlooked news that turn out to ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Back in the early eighties people dressed up in hot, humid and extremely uncomfo ...
Ever wonder how the nanochips you see in pictures wind up covered in plastic on ...
Semiconductor History being made in the 1980’s The founding of TSMC on ...
Accelerators Inc was one of the three or four early implementers of ion implante ...
Access to and use of this Website is subject to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy.
Copyright © 2020 VLSI Research Inc. All rights reserved.