Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
The tool that sparked the yield management revolution.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
This technical paper laid out the future of yield management, covering all the i ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
Technology, Circa 1981 – It's often the overlooked news that turn out to ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
One of the first commercial high current ion implanters.
Advantest - Improvements in Cost-Efficiency via parallel memory IC test highligh ...
This ignited the Copper Revolution
APT - 9155 E-Beam Resist Processor :1985-89
Access to and use of this Website is subject to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy.
Copyright © 2021 VLSI Research Inc. All rights reserved.