Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
The tool that sparked the yield management revolution.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
Technology, Circa 1981 – It's often the overlooked news that turn out to ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
1961: First Monolithic Silicon IC Chip. Invented by Robert Noyce, Fairchild
One of our industry legends, Nick DeWolf, has passed on. DeWolf co-founded Tera ...
Terry Higashi navigated TEL through the toughest times the Equipment Industry ha ...
Electronic Visions - EV150 Resist Processing System :1990s
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