Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
This technical paper laid out the future of yield management, covering all the i ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
The tool that sparked the yield management revolution.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
The industry was in its childhood? When two or three SEMICON trade shows covered ...
Well known in the U.S. as a Marubeni import, Shinkawa’s wire bonders had also ...
Ed Segal was honored for his establishment of a global representative organizati ...
Electronic Visions - EV150 Resist Processing System :1990s
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