KLA-Tencor - KLA ADD/100 Series

Summary : The dawn of automated inspection. KLA's mask inspection tools took over to see what humans could not, launching what would become a great company by pushing barriers aside.

Due to Moore's Law, IC mask layers became so complex that a human couldn't find defects reliably. Finding a defect on a semiconductor mask made looking for a needle in a hay stack seem simple. At the time they called it VLSI, which stood for Very Large Scale Integration.

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