Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
TEL's Clean Track Photoresist Processing System
Dave Markle, Senior Vice President & Chief Technical Officer at Ultratech, descr ...
Not the first such system, but near the first.
You have to make capital investment decision to secure availability of monocryst ...
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