KLA Conquers the Pellicle

Organization Name :KLA-TencorTime Period :1980'sRelevant Date :1981-11-16

Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.

Tencor at 20 Years

Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more

In the News: Technology ...

01 Jun 1981

This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Publi ... See more

KLA 200 Series Reticle ...

15 Jun 1984

KLA's Reticle Inspection System was the first automatic inspection system to ensure that killer defects as small as 0.7 microns on both reticles and photomasks would be detected. ... See more

KLA-Tencor - KLA 2020

30 Jun 1985

The tool that sparked the yield management revolution. ... See more

KLA Conquers Phase Shif ...

20 May 1991

Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask. ... See more

KLA-Tencor - KLA ADD/10 ...

01 Jan 1980

The dawn of automated inspection. KLA's mask inspection tools took over to see what humans could not, launching what would become a great company by pushing barriers aside. ... See more

Semiconductor Industry ...

31 Dec 1969

The Semiconductor Industry Association (SIA) was founded in April 1977. The article by Ron Iscoff shows the controversy that the founding of SIA created. ... See more

Intel's R&D Pipeline

05 Oct 2004

The history of semiconductor research at Intel is discussed in this 2004 conversation with Sunlin Chou. ... See more

Applied Materials - The ...