Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
The tool that sparked the yield management revolution.
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Virtually everyone seemed to be entering the semiconductor capital equipment bus ...
This photo from the AI 400 series high energy implanters is one of the earliest ...
R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is ...
Yan Borodovsky discusses DFM and Computational Lithography at Intel in historic ...
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