Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
The 8251 single cassette, horizontal, on-center clean machine features the high ...
Starting a silicon revolution, also known as the “Fairchild Brain Drain,” Bo ...
The SET's Answer To Your Photoresist Coating Problems
The technology story of the 60s was about the rise of computer giants, with IBM ...
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