Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
The tool that sparked the yield management revolution.
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
The Drytek DRIE 100 plasma etcher was the template for all cluster tools that wo ...
TEL's semiconductor production equipments meet the need of the age of VLSI.
SEMI's Great Moments in Semiconductor History: In 1947, Walter Brattain and John ...
Most assume it has been paint by the numbers for Intel, since IBM first selected ...
Access to and use of this Website is subject to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy.
Copyright © 2021 VLSI Research Inc. All rights reserved.