Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.
The tool that sparked the yield management revolution.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
ASML - Philips Beamwriter :1985-89
Jim Bowen talks about how he took Fairchild Test Systems Group from a money lose ...
The new approach to etching and deposition: The PlanarEtch ||A Plasma systems fr ...
Chuo Riken - Resist Processing Equipment :
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