Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.
The tool that sparked the yield management revolution.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
This technical paper laid out the future of yield management, covering all the i ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
Technology, Circa 1991 – As lithography moved into ever lower k factors, ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Takeda Riken, the antecedent to Advantest, was hardly known outside Japan in 198 ...
This little bench-top tester was a real Mighty Mouse© as the sixties ended an ...
Applied Materials - CA-800 Mask Aligner and Exposure System: :1980-84
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