Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Eaton's Semiconductor Foray, a case study. It was supposed to be the semiconduct ...
Inside Intel’s Microprocessor’s covers a pictorial and spec history from the ...
A pinnacle technically, it was also the end of the road for projection aligners.
Cameca - 600 Series Steppers :1980-84
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