KLA Conquers the Pellicle

Organization Name :KLA-TencorTime Period :1980'sRelevant Date :1981-11-16

Summary : Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to overcome.

In the News: Technology ...

01 Jun 1981

This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Publi ... See more

Tencor at 20 Years

Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more

KLA 200 Series Reticle ...

15 Jun 1984

KLA's Reticle Inspection System was the first automatic inspection system to ensure that killer defects as small as 0.7 microns on both reticles and photomasks would be detected. ... See more

KLA-Tencor - KLA 2020

30 Jun 1985

The tool that sparked the yield management revolution. ... See more

KLA Conquers Phase Shif ...

20 May 1991

Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask. ... See more

KLA-Tencor - KLA ADD/10 ...

01 Jan 1980

The dawn of automated inspection. KLA's mask inspection tools took over to see what humans could not, launching what would become a great company by pushing barriers aside. ... See more

ASML - PAS 2000 Wafer S ...

30 Jun 1985

Virtually everyone seemed to be entering the semiconductor capital equipment business in the early eighties. An entourage of government bodies, both foreign and domestic, as well as interested but alien busines ... See more

Intel tackles Mobile wi ...

12 Mar 2003

The launch of Intel’s Centrino in 2003 marks move that took laptop PCs into the mobile world. It is often claimed that Intel was a failure in mobile. But consider that Intel’s profits of $11B in Otellini” ... See more

Building a Global Posit ...

16 Mar 2006

The second part of this three-part interview covers Applied Materials in the 1980s and its transformation into a global company. Jim Morgan talks about Japan, the Rule of Three, SEMI, and his vision of a globa ... See more

Leybold - Heraus-Vertic ...

An early disk coating system ... See more