This photo shows a descendant of the first Concept One, almost a decade after its original development as a conventional CVD system. Teos proved to be decidedly difficult to implement. While not the first, Novellus was among the first to be successful with this new Concept.
- Key Contributors: To Be Recognized.
- Industry code: 1463.324
- ©1995 by Novellus
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- Mfr’s Code: NVS