Novellus - Concept One CVD Dielectric Deposition System

Summary : This photo shows a descendant of the first Concept One, almost a decade after its original development as a conventional CVD system.

This photo shows a descendant of the first Concept One, almost a decade after its original development as a conventional CVD system. Teos proved to be decidedly difficult to implement. While not the first, Novellus was among the first to be successful with this new Concept.

 

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  • Key Contributors: To Be Recognized.

 

  • Industry code: 1463.324
  • ©1995 by Novellus
    All Rights Reserved. Copied with the implied permission of the Copyright Owner
  • Mfr’s Code: NVS

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