Summary : The series that launched a thousand careers. The NSR series would become the chip maker’s model of reliability, forcing all equipment manufacturers to build reliable tools.
Nikon Step-and_Repeat Systems NSR-205i10c/i9c
The state-of-the-art workhorse for 0.35 micron.
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An early excimer laser stepper for 0.45 micron.
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Cobilt - Model AF110 Brushless Scrubber :1980-84
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