JSR - Plasmaster-Si, Silylation System

Organization Name :JSR

Summary : Plasmaster-Si is a silylation track specially dedicated to the Desire process.

IBM’s development of ...

22 Sep 1997

IBM was first with copper interconnect for semiconductors. It marked the successful culmination of a decade-long search for a material to replace aluminum. ... See more

Takeda Riken, the antecedent to Advantest, was hardly known outside Japan in 1980 and by 1985 it was driving the VLSI or Very Large Scale Integration ATE market as the largest company at the time fell back. Gro ... See more

Technics - PE II-A Plan ...

The new approach to etching and deposition: The PlanarEtch ||A Plasma systems from technics ... See more

Advantest - ATE Cost-Ef ...

Advantest - Improvements in Cost-Efficiency via parallel memory IC test highlights from this 1986 Annual Report excerpt ... See more

Varian - The MBE GEN II ...

30 Jun 1985

Not many commercial machines get more exotic than this. It even looks like something out of StarTrek. ... See more

Gasonics - HiPOX System

30 Jun 1975

Possibly the only successful high pressure system. ... See more

KLA Conquers Phase Shif ...

20 May 1991

Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask. ... See more

Auto Etch 590 Oxide Etc ...

The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the grounded electrode. ... See more

Nikon - NSR 1755EX8A St ...

30 Jun 1995

An early excimer laser stepper for 0.45 micron. ... See more

Tom Sonderman on Automa ...

29 Mar 2004

Thomas Sonderman discusses Automated Precision Manufacturing and how it allows AMD to compete effectively in the semiconductor industry. ... See more