TRE - 800SLR Wafer Stepper

30 Jun 1955

1961: First Monolithic Silicon IC Chip. Invented by Robert Noyce, Fairchild

The state-of-the-art workhorse for 0.35 micron.

Saturn wafer stepper Advancing Mix-and-Match Lithography

29 Nov 2004

Barry Rapozo was honored for the establishment of selling processes in wafer fab ...

It only took 196M Bytes of disk storage for masks in 1983, but hasn’t changed ...

30 Jun 1975

Not the first such system, but near the first.

01 Jan 1980

The dawn of automated inspection. KLA's mask inspection tools took over to see w ...

30 Jun 1985

Here are two fine examples of third optical inspection systems when such systems ...

30 Jun 1975

This little bench-top tester was a real Mighty Mouse© as the sixties ended and ...

Toshibas advanced control technique created this highly innovative system