Summary : Canon - Various models of Mask Aligners :1980-84 - The only company to offer all 3 types of litho tools.
Proximity aligners were a bridge tool between the original contact aligners and ...
Canon - FPA-5000 ES2 Aligner :1990s - An early DUV scanner.
Canon - FPA-3000 EX4 Aligner :1990s
Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answ ...
TEL's Clean Track Photoresist Processing System
VIBRATRAC, GCA's new fully automatic production end station, is the result of a ...
Applied Materials - SPCVD-4000 :1960s - An LPCVD tool from a time when Applied c ...
varian 3135 Vacuum/Coater System
When I first visited this company in the early seventies, it was known as Dainip ...
Chuo Riken - Resist Processing Equipment :
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