Canon - FPA-5000 ES2 Aligner

Organization Name :Canon

Summary : Canon - FPA-5000 ES2 Aligner :1990s - An early DUV scanner.

Canon - PLA 501F/FA Pro ...

30 Jun 1975

Proximity aligners were a bridge tool between the original contact aligners and projection aligners. Yield from contact aligners was extremely low, mainly because the mask was just a stencil laying over the pho ... See more

Canon - FPA-3000 EX4 Al ...

Canon - FPA-3000 EX4 Aligner :1990s ... See more

Canon - Various models ...

Canon - Various models of Mask Aligners :1980-84 - The only company to offer all 3 types of litho tools. ... See more

Canon - Model FPA141 Pr ...

30 Jun 1985

Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answer to the threatening storms of the projection aligner revolution. ... See more

ASML - PAS 2500/10 Step ...

15 Jun 1986

ASML - PAS 2500/10 Stepper :1985-89 ... See more

Fusion - UV Gemini Phot ...

Gemini-The Platform of Excellence for Photoresist Processing ... See more

KLA lays out Yield Mana ...

01 Jun 1981

This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Publi ... See more