Canon - FPA-5000 ES2 Aligner

Organization Name :Canon

Summary : Canon - FPA-5000 ES2 Aligner :1990s - An early DUV scanner.

Canon - PLA 501F/FA Pro ...

30 Jun 1975

Proximity aligners were a bridge tool between the original contact aligners and projection aligners. Yield from contact aligners was extremely low, mainly because the mask was just a stencil laying over the pho ... See more

Canon - Various models ...

Canon - Various models of Mask Aligners :1980-84 - The only company to offer all 3 types of litho tools. ... See more

Canon - FPA-3000 EX4 Al ...

Canon - FPA-3000 EX4 Aligner :1990s ... See more

Canon - Model FPA141 Pr ...

30 Jun 1985

Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answer to the threatening storms of the projection aligner revolution. ... See more

ASML - PAS 2500/10 Step ...

15 Jun 1986

ASML - PAS 2500/10 Stepper :1985-89 ... See more

Hitachi - HL-700, E-bea ...

Rare captively made e-beam system that would break out into the commercial world. ... See more

Tempress - DDC Diffusio ...

Tempress - A unit of general signal - DDC Diffusion furnace ... See more

Applied Materials - SPC ...

Applied Materials - SPCVD-4000 :1960s - An LPCVD tool from a time when Applied could do little right. The vacuum pump created a vibration that caused wafers to rotate in their boat. It was one of the tools Jim ... See more

Edwards - Thin Film Dep ...

Versatile Systems For Thin Film Deposition ... See more

Invention of the Integr ...

28 Aug 1958

SEMI's Great Moments in Semiconductor History: Invention of the IC ... See more