

Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...
In 1983 the semiconductor equipment industry was coming out of a two-year slow-d ...
The Chip Insider's review of Applied Materials' Producer at its introduction
IBM’s EL-1: a milestone in e-beam lithography
IBM is using 1X x-ray lithography to expose the gate level of 0.15 micron PowerP ...
Factoids from the edge: Some like to say that EUV development has cost more than ...
300mm wafer development in the mid-90s failed as a silicon cycle downturn took t ...
At ISSCC, someone predicted that fabs would soon cost $100B. Do you agree (we do ...
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