Lam Research AutoEtch 480

Summary : Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers.

Annexure :

Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. It one of the first single wafer, load-locked plasma etchers. And its market success made it one of the best etchers. Introduced in 1981, just a year after the company’s founding, this would be one of the key products to build Lam into a giant in the semiconductor industry, while displacing the existing market leaders. It marked a substantial divergence from what was available at the time. As Lam put it, “AutoEtch 480 has been created by Lam Research experts from “the ground up’’ to be uniquely different from other plasma etching systems. The system combines the very latest plasma etching technology with the most recent microcomputing and airlock wafer transfer techniques.

You may like this also:

Lam Research: the Early ...
Lam Research: the Early ...
30 Jun 1985

One of the most celebrated companies in the equipment industry, Lam was once a s ...

One of the most celebrated companies in the equipment industry, Lam was once a s ... ... See more

VLSI - An Economist's V ...
VLSI - An Economist's V ...
15 Jan 1980

A Presentation Draft of The First Wafer Fab Cost Optimization Model1980

A Presentation Draft of The First Wafer Fab Cost Optimization Model1980 ... See more

Nat Ceglio: EUV Pioneer
Nat Ceglio: EUV Pioneer
01 Jan 1988

Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...

Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ... ... See more

1983 The Quality Revolu ...
1983 The Quality Revolu ...
13 Jun 1983

In 1983 the semiconductor equipment industry was coming out of a two-year slow-d ...

In 1983 the semiconductor equipment industry was coming out of a two-year slow-d ... ... See more

BEOL Origins | The Chip ...
BEOL Origins | The Chip ...
15 Feb 1995

When Back End of the Line wafer processing was new and emergent.

When Back End of the Line wafer processing was new and emergent. ... See more

The 1st Cleanroom
The 1st Cleanroom
24 Nov 1964

The cleanroom was invented in the early 1960s by Willis Whitfield, while working ...

The cleanroom was invented in the early 1960s by Willis Whitfield, while working ... ... See more

Megafabs: Why they buil ...
Megafabs: Why they buil ...
17 Jan 2008

One of the most interesting questions to answer is why are Megafabs so popular? ...

One of the most interesting questions to answer is why are Megafabs so popular? ... ... See more

Copper Interconnect – ...
Copper Interconnect – ...
15 Jun 1998

The transition from aluminum to copper wiring in semiconductor process technolog ...

The transition from aluminum to copper wiring in semiconductor process technolog ... ... See more

Making Silicon Commerci ...
Making Silicon Commerci ...
15 Jun 1955

SEMI's Great Moments in Semiconductor History: In the mid-1950s. Dr. Henry W. Gu ...

SEMI's Great Moments in Semiconductor History: In the mid-1950s. Dr. Henry W. Gu ... ... See more

How much 300mm Semicond ...
How much 300mm Semicond ...
20 Mar 1998

300mm wafer development in the mid-90s failed as a silicon cycle downturn took t ...

300mm wafer development in the mid-90s failed as a silicon cycle downturn took t ... ... See more
  • Facebook Logo
  • Twitter Logo
  • Linkdin Logo
  • Youtube Logo

Access to and use of this Website is subject to TechInsights' Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to TechInsights' Terms of Use (including Copyright Policy & Claims) and Privacy Policy.

Copyright © 2023 TechInsights Inc. All rights reserved.