Lam Research AutoEtch 480

Summary : Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers.

Annexure :

Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. It one of the first single wafer, load-locked plasma etchers. And its market success made it one of the best etchers. Introduced in 1981, just a year after the company’s founding, this would be one of the key products to build Lam into a giant in the semiconductor industry, while displacing the existing market leaders. It marked a substantial divergence from what was available at the time. As Lam put it, “AutoEtch 480 has been created by Lam Research experts from “the ground up’’ to be uniquely different from other plasma etching systems. The system combines the very latest plasma etching technology with the most recent microcomputing and airlock wafer transfer techniques.

You may like this also:

Lam Research: the Early ...
Lam Research: the Early ...
30 Jun 1985

One of the most celebrated companies in the equipment industry, Lam was once a s ...

One of the most celebrated companies in the equipment industry, Lam was once a s ... ... See more

VLSI - An Economist's V ...
VLSI - An Economist's V ...
15 Jan 1980

A Presentation Draft of The First Wafer Fab Cost Optimization Model1980

A Presentation Draft of The First Wafer Fab Cost Optimization Model1980 ... See more

Nat Ceglio: EUV Pioneer
Nat Ceglio: EUV Pioneer
01 Jan 1988

Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...

Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ... ... See more

1983 The Quality Revolu ...
1983 The Quality Revolu ...
13 Jun 1983

In 1983 the semiconductor equipment industry was coming out of a two-year slow-d ...

In 1983 the semiconductor equipment industry was coming out of a two-year slow-d ... ... See more

300mm Semiconductor Waf ...
300mm Semiconductor Waf ...
30 Jun 1998

All technology revolutions are not so easy. other than in 20:20 hindsight. The i ...

All technology revolutions are not so easy. other than in 20:20 hindsight. The i ... ... See more

Did EUV development cos ...
Did EUV development cos ...
14 Jan 2010

Factoids from the edge: Some like to say that EUV development has cost more than ...

Factoids from the edge: Some like to say that EUV development has cost more than ... ... See more

Multi-Pattern Lithograp ...
Multi-Pattern Lithograp ...
05 Feb 2010

Also known as DPT, or dual pattern technology, for exposing semiconductor wafers ...

Also known as DPT, or dual pattern technology, for exposing semiconductor wafers ... ... See more

Semiconductor Wafer Fab ...
Semiconductor Wafer Fab ...
12 Feb 2010

At ISSCC, someone predicted that fabs would soon cost $100B. Do you agree (we do ...

At ISSCC, someone predicted that fabs would soon cost $100B. Do you agree (we do ... ... See more

Making Silicon Commerci ...
Making Silicon Commerci ...
15 Jun 1955

SEMI's Great Moments in Semiconductor History: In the mid-1950s. Dr. Henry W. Gu ...

SEMI's Great Moments in Semiconductor History: In the mid-1950s. Dr. Henry W. Gu ... ... See more

Are the foundries slowi ...
Are the foundries slowi ...
18 Jan 2013

Silicon mythology has it that node progression is predictable and constant. In r ...

Silicon mythology has it that node progression is predictable and constant. In r ... ... See more
  • Facebook Logo
  • Twitter Logo
  • Linkdin Logo
  • Youtube Logo

Access to and use of this Website is subject to TechInsights' Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to TechInsights' Terms of Use (including Copyright Policy & Claims) and Privacy Policy.

Copyright © 2026 TechInsights Inc. All rights reserved.