Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...
One of the most celebrated companies in the equipment industry, Lam was once a s ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...
IBM’s EL-1: a milestone in e-beam lithography
When Back End of the Line wafer processing was new and emergent.
One of the most interesting questions to answer is why are Megafabs so popular? ...
This superb article, about the birth of the Perkin Elmer Projection Scanning Ali ...
IBM is using 1X x-ray lithography to expose the gate level of 0.15 micron PowerP ...
SEMI's Great Moments in Semiconductor History: In the mid-1950s. Dr. Henry W. Gu ...
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