Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
One of the most celebrated companies in the equipment industry, Lam was once a s ...
Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...
The cleanroom was invented in the early 1960s by Willis Whitfield, while working ...
One of the most interesting questions to answer is why are Megafabs so popular? ...
All technology revolutions are not so easy. other than in 20:20 hindsight. The i ...
Factoids from the edge: Some like to say that EUV development has cost more than ...
Also known as DPT, or dual pattern technology, for exposing semiconductor wafers ...
At ISSCC, someone predicted that fabs would soon cost $100B. Do you agree (we do ...
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