Lam Research’s AutoEtch 480 was a landmark in the history of plasma etche ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
One of the most celebrated companies in the equipment industry, Lam was once a s ...
Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...
IBM’s EL-1: a milestone in e-beam lithography
Applied Materials’ Producer marked an important turning point in the hist ...
This superb article, about the birth of the Perkin Elmer Projection Scanning Ali ...
One of the most interesting questions to answer is why are Megafabs so popular? ...
IBM is using 1X x-ray lithography to expose the gate level of 0.15 micron PowerP ...
300mm wafer development in the mid-90s failed as a silicon cycle downturn took t ...
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