Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...
One of the most celebrated companies in the equipment industry, Lam was once a s ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...
IBM’s EL-1: a milestone in e-beam lithography
When Back End of the Line wafer processing was new and emergent.
The cleanroom was invented in the early 1960s by Willis Whitfield, while working ...
IBM is using 1X x-ray lithography to expose the gate level of 0.15 micron PowerP ...
Factoids from the edge: Some like to say that EUV development has cost more than ...
300mm wafer development in the mid-90s failed as a silicon cycle downturn took t ...
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