Multi-Pattern Lithography Economics and Killer Defect Economics

Time Period :2010'sRelevant Date :2010-02-05

Summary : Also known as DPT, or dual pattern technology, for exposing semiconductor wafers was stuck around 2010 because the CoO cost model led to a conclusion that DPT was too expensive. It was really a misapplication of CoO and better tools were needed. Going back to basics: MPT cost analysis needed to start with...

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