Multi-Pattern Lithography Economics and Killer Defect Economics

Summary : Also known as DPT, or dual pattern technology, for exposing semiconductor wafers was stuck around 2010 because the CoO cost model led to a conclusion that DPT was too expensive. It was really a misapplication of CoO and better tools were needed. Going back to basics: MPT cost analysis needed to start with...

You may like this also:

Access to and use of this Website is subject to TechInsights' Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to TechInsights' Terms of Use (including Copyright Policy & Claims) and Privacy Policy.

Copyright © 2022 TechInsights Inc. All rights reserved.