Silicon Valley Group - 90 Series Resist Processing

Significant improvement in manufacturing worthiness for the first Step-and-Scan ...

Introducing Micrascan III+ for Critical Level Lithography

Silicon Valley Group - ProCell Track System - 200/300mm System Specifications

Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)

24 May 2018

In 1968, standard clean room practices were lax. Facilities were kept reasonably ...

30 Jun 1985

Applied Materials - Precision 5000 CVD, The blockbuster that made cluster tool a ...

Applied Materials - P5000, Etcher :1985-89 - Followed the 8300, but was eclipsed ...

Gary Patton never knew he wanted to be a scientist when he was a kid.

Anelva - MBE 831 Molecular Beam Epitaxy System :1985-89

01 Jan 1980

The dawn of automated inspection. KLA's mask inspection tools took over to see w ...