Silicon Valley Group - 90 Series Resist Processing

Significant improvement in manufacturing worthiness for the first Step-and-Scan ...

Introducing Micrascan III+ for Critical Level Lithography

Silicon Valley Group - ProCell Track System - 200/300mm System Specifications

Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)

Terry Higashi navigated TEL through the toughest times the Equipment Industry ha ...

30 Jun 1985

High-energy ion implanters, typically in the range of 1 to 3 MEV, were originall ...

The APTCON 3000 is a modular spin processing system designed by APT and CONVAC, ...

Rare captively made stepper with a Minolta Lens.

30 Jun 1975

Not the first such system, but near the first.

APT - 9155 E-Beam Resist Processor :1985-89