Silicon Valley Group - 90 Series Resist Processing

Significant improvement in manufacturing worthiness for the first Step-and-Scan ...

Introducing Micrascan III+ for Critical Level Lithography

Silicon Valley Group - ProCell Track System - 200/300mm System Specifications

Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)

30 Jun 1995

Though not the first step & scan system—that honor goes to Perkin Elmer—this ...

15 Jul 1971

The industry was in its childhood? When two or three SEMICON trade shows covered ...

HMX Xray Inspection System : A high performance system for general non-destruct ...

30 Jun 1995

An early excimer laser stepper for 0.45 micron.

18 Jul 2003

Starting a silicon revolution, also known as the “Fairchild Brain Drain,” Bo ...

Lam Research Corporation was founded in 1980 when advance in micro miniaturizati ...