Summary : Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology produce dramatic changes in the way that integrated circuits were made.
The AutoEtch 590 reduces ion bombardment and attendant device damage by placing ...
Long regarded as technology leader in etch, Lam took additional aggressive steps ...
This technical paper laid out the future of yield management, covering all the i ...
ASML - Philips Beamwriter :1985-89
The history and accomplishments of the Semiconductor Research Corporation
Gemini-The Platform of Excellence for Photoresist Processing
Possibly the only successful high pressure system.
In the early eighties virtually every company was seeking entry into the equipme ...
An early disk coating system
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