Summary : As semiconductor geometry device continues to shring, positive resist systems are becoming increasingly important in meeting the need of high resolution.
Solitec's commitment to quality automation delivers results
Though not the first step & scan system—that honor goes to Perkin Elmer—this ...
In 1968, standard clean room practices were lax. Facilities were kept reasonably ...
ASML - Philips Beamwriter :1985-89
Bill Tobey on his 2006 Bob Graham Award and Lessons Learned
The first commercial American X-ray lithography system.
The semiconductor industry has always worked hard to have and to maintain extrem ...
You might think that some of the early glass deposition systems looked like gran ...
Applied Materials - Silox Model AMS 2600 & 2660 :1960s - An early tool for low t ...
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