Auto Etch 590 Oxide Etcher

Organization Name :Lam Research

Summary : The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the grounded electrode.

Excerpt from 1999 Annua ...

Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to position the Company for success and to gain market share ... See more

Excerpt from 1984 Annua ...

Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology produce dramatic changes in the way that integrated circuits were made. ... See more

GCA - Mann 4800 Direct ...

30 Jun 1975

It broke the 1 micron CD barrier. ... See more

Back in the early eighties people dressed up in hot, humid and extremely uncomfortable Bunny Suits while wafers swept naked through the factory, picking up innumerable yield-killing particles. ... See more

Cobilt - Autofab, Inlin ...

15 Jun 1974

Cobilt - Autofab, Inline Resist Processing System ... See more

Terry Higashi - HoF

Terry Higashi navigated TEL through the toughest times the Equipment Industry has ever seen, all the while building them into a technology leader ... See more

ESEC Group Products

31 Dec 1969

ESEC is a leading supplier of system solutions and technologies for its business partners in silicon packaging and electronic assembly ... See more

Hitachi - RA-101HL & RA ...

Rare captively made stepper with a Minolta Lens. ... See more

Lessons Learned

21 Aug 2008

Mihir Parikh tells us about the big Automation Do's and Don'ts ... See more

Why the Giant Computer ...

15 Jun 1985

The technology story of the 60s was about the rise of computer giants, with IBM at the vanguard. This went on through the 70s but shifted in the 80s with the advent of the PC. But it wasn’t the advent of the PC ... See more