Auto Etch 590 Oxide Etcher

Organization Name :Lam Research

Summary : The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the grounded electrode.

Excerpt from 1999 Annua ...

Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to position the Company for success and to gain market share ... See more

Excerpt from 1984 Annua ...

Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology produce dramatic changes in the way that integrated circuits were made. ... See more

SRC 25th Anniversary

01 Jun 2007

The history and accomplishments of the Semiconductor Research Corporation ... See more

Thermco Diffusion Furna ...

30 Jun 1965

Here is an excellent view of a state-of-the-art diffusion furnace from the mid 1960s. ... See more

The SUSS ACS200 Microlithography Cluster offers superior process performance and unsurpassed productivity for challenging coating applications including coatings of unusually thick and thin photoresist ... See more

Environmental Health an ...

15 Sep 1994

The semiconductor industry has always worked hard to have and to maintain extremely high health and safety levels. ... See more

Verteq - Ultraclean Hig ...

Verteq - Ultraclean High Purity Megasonic System offers the same superior cleaning performance and ease of use as standard megasonic cleaning systems, plus an exclusive polished quartz transduser panel ... See more