Auto Etch 590 Oxide Etcher

Organization Name :Lam Research

Summary : The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the grounded electrode.

Excerpt from 1984 Annua ...

Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology produce dramatic changes in the way that integrated circuits were made. ... See more

Excerpt from 1999 Annua ...

Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to position the Company for success and to gain market share ... See more

International Standards ...

15 Jun 1990

A conversation with Robert N. Noyce and Karel Urbanek ... See more

Inside Intel’s Microp ...

Inside Intel’s Microprocessor’s covers a pictorial and spec history from their first, the 4004, through their Centrino™ P4 with Hyper treading. ... See more

Ever wonder how innovation really happens? Think it's someone sitting back and dreaming up an idea? In this video, Yan Borodovsky, describes how it starts with a nuisance that grows until you do something about ... See more

ASET - Model 1562 g-Lin ...

ASET - Model 1562 g-Line Stepper :1985-89 - Once a leader, they died after Japan’s onslaught. ... See more

IBM’s R&D Partnering ...

10 Jan 2008

The Chip Insider's Cook’s Tour: A deep immersion course in what IBM was doing in 2008 at both Albany Nanotech and at IBM’s Fishkill facility is reviewed by VLSIresearch's Chip Insider in this 2008 article. ... See more

Intel's 35th Anniversar ...

18 Jul 2003

Starting a silicon revolution, also known as the “Fairchild Brain Drain,” Bob Noyce and Gordon Moore leave Fairchild Semiconductor ... See more

Model IS-4 2nd Op Inspe ...

30 Jun 1985

Here is another excellent example of an early Second Optical Inspection Station representative of the pre-automation era. ... See more

Uniplane System 4000 Hi ...

The versatile programmability of Kasper's System 4000 High Pressure Scrubber allows semiconductor wafers to be decontaminated by brush scrubbing. ... See more