Auto Etch 590 Oxide Etcher

Organization Name :Lam Research

Summary : The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the grounded electrode.

Excerpt from 1984 Annua ...

Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology produce dramatic changes in the way that integrated circuits were made. ... See more

Excerpt from 1999 Annua ...

Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to position the Company for success and to gain market share ... See more

This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Publi ... See more

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15 Jul 1971

The industry was in its childhood? When two or three SEMICON trade shows covered the entire world? ... See more

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15 Jun 1974

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Craig Barrett, Chairman of Intel, describes why America is losing its edge and what needs to be done about it. ... See more

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Ultratech - Positive Resist Develop/Rinse Station Model 504 - For automatic batch developing and rinsing positive resist on wafers and photomasks ... See more