Auto Etch 590 Oxide Etcher

Organization Name :Lam Research

Summary : The AutoEtch 590 reduces ion bombardment and attendant device damage by placing the wafer on the grounded electrode.

Excerpt from 1984 Annua ...

Lam Research Corporation was founded in 1980 when advance in micro miniaturization technology produce dramatic changes in the way that integrated circuits were made. ... See more

Excerpt from 1999 Annua ...

Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to position the Company for success and to gain market share ... See more

Fusion - 200 PCU Photos ...

The 200PCU Photostabilizer utilizes the standard dual unicassette wafer handling platform. ... See more

Lasarray - DWL 2.0, Las ...

The DWL 2.0 has been designed with a modular concept in order to ensure maximum up-time and to facilitate performance and application upgrades even in the field. ... See more

Leybold - Heraus-4 inch ...

You have to make capital investment decision to secure availability of monocrystalline silicon of a variety of specific qualities. ... See more

Muhlbauer - VideoSem, D ...

The VideoSem 2010 is a fully automatic vision system for die bond inspection. ... See more

Veeco - ai Model 2100 I ...

30 Jun 1975

Accelerators Inc was one of the three or four early implementers of ion implanters. The company was acquired by Veeco in the mid seventies. ... See more

Silicon Valley Group - ...

Silicon Valley Group - 90 Series Resist Processing - High Productivity photo processing ... See more

Ultratech - Positive Re ...

Ultratech - Positive Resist Develop/Rinse Station Model 504 - For automatic batch developing and rinsing positive resist on wafers and photomasks ... See more

APT - 9155 E-Beam Resis ...

APT - 9155 E-Beam Resist Processor :1985-89 ... See more