Silicon Valley Group - ProCell Track System

Significant improvement in manufacturing worthiness for the first Step-and-Scan ...

Introducing Micrascan III+ for Critical Level Lithography

Silicon Valley Group - 90 Series Resist Processing - High Productivity photo pro ...

Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)

30 Jun 1975

Possibly the only successful high pressure system.

30 Jun 1985

Well known in the U.S. as a Marubeni import, Shinkawa’s wire bonders had also ...

It only took 196M Bytes of disk storage for masks in 1983, but hasn’t changed ...

Applied Materials - AMS 2000 Silox Reactor :1970s

Applied Materials - SPCVD-4000 :1960s - An LPCVD tool from a time when Applied c ...

Plasmaster-Si is a silylation track specially dedicated to the Desire process.