Silicon Valley Group - ProCell Track System

Significant improvement in manufacturing worthiness for the first Step-and-Scan ...

Introducing Micrascan III+ for Critical Level Lithography

Silicon Valley Group - 90 Series Resist Processing - High Productivity photo pro ...

Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)

Advantest turned 50 on July 1, 2004. It was a milestone for one of Japan's great ...

30 Jun 1975

One of the first commercial high current ion implanters.

30 Jun 1975

The semiconductor industry was plunging rapidly into alloy deposition to overcom ...

Gemini-The Platform of Excellence for Photoresist Processing

27 Jun 1997

Important events and trends were in 1997 for the semiconductor industry

R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is ...