Silicon Valley Group - Micrascan III+ Step-and-Scan

Significant improvement in manufacturing worthiness for the first Step-and-Scan ...

Silicon Valley Group - ProCell Track System - 200/300mm System Specifications

Silicon Valley Group - 90 Series Resist Processing - High Productivity photo pro ...

Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)

30 Jun 1985

Applied Materials - Precision 5000 CVD, The blockbuster that made cluster tool a ...

30 Jun 1975

Possibly the only successful high pressure system.

The AutoEtch 590 reduces ion bombardment and attendant device damage by placing ...

30 Jun 1985

If this photo looks a bit ghostly that’s because it is. We have no surviving p ...

30 Jun 1985

Here is the first true lights-out-fab. Since the beginning of the industry the d ...

29 Nov 2004

Ed Segal was honored for his establishment of a global representative organizati ...