Significant improvement in manufacturing worthiness for the first Step-and-Scan ...
Introducing Micrascan III+ for Critical Level Lithography
Silicon Valley Group - ProCell Track System - 200/300mm System Specifications
Silicon Valley Group - 90 Series Resist Processing - High Productivity photo pro ...
Not the first such system, but near the first.
Ultratech Stepper - Model 900 H/G Line stepper - Versatile, Adaptable, Flexible
BTU - Bruce Diffusion Furnaces :1980-84 - A Real Workhorse from the Early Days.
CONVAC Photo mask processing equipment
It only took 196M Bytes of disk storage for masks in 1983, but hasn’t changed ...
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