Summary : The LS22 Series of large substrate spinners is designed for versatility, ease of use and safety in a variety of manual and automated research and development process.
R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is ...
TEL's Clean Track Photoresist Processing System
Andy Grove talks at IMEC 2004 - the Intel Manufacturing Excellence Conference - ...
IBM was first with copper interconnect for semiconductors. It marked the success ...
HMX Xray Inspection System : A high performance system for general non-destruct ...
Rare captively made e-beam system that would break out into the commercial world ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Here is another excellent example of an early Second Optical Inspection Station ...
Deep UV 40KX ULTRACURE Photoresist Stabilization Sytsem
Plasmaster-Si is a silylation track specially dedicated to the Desire process.
Copyright © 2020 VLSI Research Inc. All rights reserved.