Summary : The LS22 Series of large substrate spinners is designed for versatility, ease of use and safety in a variety of manual and automated research and development process.
R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The history and accomplishments of the Semiconductor Research Corporation
In this segment, Wilf Corrigan details the structural ingredients of the ASIC se ...
MX-17 LSI Test System by Adar Associates, Inc...
varian 3135 Vacuum/Coater System
Cobilt - Model AF110 Brushless Scrubber :1980-84
Chuo Riken - Resist Processing Equipment :
APT - 9155 E-Beam Resist Processor :1985-89
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