Headway Research - R & D Spin Coater

Organization Name :Headway Research

Summary : R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is for both the 200 mm and 300 mm wafers.

Headway Research - LS22 ...

The LS22 Series of large substrate spinners is designed for versatility, ease of use and safety in a variety of manual and automated research and development process. ... See more

This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Publi ... See more

Lintott - Early Ion Imp ...

30 Jun 1975

One of the first commercial high current ion implanters. ... See more

Art Zafiropoulo and his ...

29 Nov 2004

Art Zafiropoulo was honored for championing technology through innovative marketing approaches: first with plasma etching and later with “mix and match” lithographic manufacturing strategies. ... See more

KLA Conquers the Pellic ...

16 Nov 1981

Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to o ... See more

Shinkawa - SWB-FA-UTC-4 ...

30 Jun 1985

Well known in the U.S. as a Marubeni import, Shinkawa’s wire bonders had also been recognized throughout the world as among the best of class. ... See more

Nikon - NSR 1755EX8A St ...

30 Jun 1995

An early excimer laser stepper for 0.45 micron. ... See more

LASA Industries - Proto ...

30 Jun 1985

Here is the first true lights-out-fab. Since the beginning of the industry the dream was to have a single system manufacturing plant. ... See more

Perkin-Elmer - MEBES Pa ...

It only took 196M Bytes of disk storage for masks in 1983, but hasn’t changed is the 24 hours takes to write an advanced one. ... See more

Fusion - Dual Chamber P ...

Dual Chamber Photostabilizer ... See more