Summary : R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is for both the 200 mm and 300 mm wafers.
The LS22 Series of large substrate spinners is designed for versatility, ease of ...
Today the company is known as Verigy and they are considered a powerhouse of sem ...
Toshio Maruyama reflects on the history and future of Advantest and its role in ...
Canon - Various models of Mask Aligners :1980-84 - The only company to offer all ...
CONVAC Photo mask processing equipment
The time was the early eighties. Change for semiconductor equipment was in the a ...
Rare captively made stepper with a Minolta Lens.
This ignited the Copper Revolution
Toshibas advanced control technique created this highly innovative system
SEMI's Great Moments in Semiconductor History: Invention of the IC
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