Summary : R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is for both the 200 mm and 300 mm wafers.
The LS22 Series of large substrate spinners is designed for versatility, ease of ...
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Eaton's Semiconductor Foray, a case study. It was supposed to be the semiconduct ...
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Verteq - Ultraclean High Purity Megasonic System offers the same superior cleani ...
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Yan Borodovsky discusses DFM and Computational Lithography at Intel in historic ...
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