Summary : R & D spin coater for wafers up to 300 mm in diameter. Alignment system/chuck is for both the 200 mm and 300 mm wafers.
The LS22 Series of large substrate spinners is designed for versatility, ease of ...
One of the first commercial high current ion implanters.
IBM was first with copper interconnect for semiconductors. It marked the success ...
The tool that sparked the yield management revolution.
How the SIA got started is an video interview with the legendary Wilf Corrigan w ...
A pinnacle technically, it was also the end of the road for projection aligners.
The failure that was supposed to save the U.S. lithography infrastructure. It wa ...
Watch circuit test system 193A
Microlite 150 Series Photostabilizer Systems provide a clean one-step process fo ...
Mihir Parikh tells us about the big Automation Do's and Don'ts
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