TwinScan Scanning Stepper by ASML
Just as the first lights of a new millennium were dawning in 1999, ASML announced its newest lithography product, The TwinScan Scanning Stepper. Here was a tool representing the latest in technology: a bridge tool spanning the 200/300 mm wafer size; a lens family capable of ranging from i line at 365 nm down to ArF lenses compatible with 193 nm; variable focal depth adjustment; improved overlay down to 0.6nm; and symmetrical side loading for foups.
These are just a few of the advancements that helped propel ASML to the leading supplier of steppers in the late twentieth and early twenty-first centuries.
- Key Contributors: To Be Recognized.
- Industry code: 1434.365
- From a non-copyrighted Technical Backgrounder, 1999
Copied with the implied permission of the Copyright Owner
- Mfr’s Code: ASML
Posted by: George,Richard A.
Posted on: 10/31/06 01:16:39 AM
At least one of the key contributors to the ASML TwinScan family, yet to be named, should be Erik Loopstra. Erik was the system engineer responsible for the overall design of the TwinScan family. He is a Fellow of ASML and has longstanding service in ASML as one of its leading system engineers, helping to pioneer new machines, including the TwinScan and the EUV machines.