Tokyo Electron's Clean Track series of Photoresist Processing System were a landmark in quality and reliability in a wafer-fab equipment segment prone to failure on semiconductor production lines because of the gooey nature of resist. This brochure of the Clean Track Mark II, provides a good example of how these tools looked.
Tetsuo (Tom) Tsuneishi for providing the strategic vision behind Tokyo Electronâ ...
Terry Higashi navigated TEL through the toughest times the Equipment Industry ha ...
TEL's semiconductor production equipments meet the need of the age of VLSI.
If this photo looks a bit ghostly that’s because it is. We have no surviving p ...
TEL's history and philosophy of serving semiconductor manufacturers
ASML - Philips Beamwriter :1985-89
Arguably the best stepper of its day, based on resale values.
Applied Materials - 7830Si CD-SEM :1990s - Opal’s child.
The launch of Intel’s Centrino in 2003 marks move that took laptop PCs into th ...
APT - 9155 E-Beam Resist Processor :1985-89
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