Hitachi - HL-700, E-beam Lithography System

Rare captively made stepper with a Minolta Lens.

18 Jun 1985

The Dawn of the CD SEM came with Hitachi’s (now Hitachi High-Technologies) add ...

22 Sep 1997

IBM was first with copper interconnect for semiconductors. It marked the success ...

30 Jun 1985

Applied Materials - Precision 5000 CVD, The blockbuster that made cluster tool a ...

30 Jun 1995

Back in the early eighties people dressed up in hot, humid and extremely uncomfo ...

26 Jul 2006

Martin van den Brink, employee number 1 at ASML, describes what it's been like t ...

The SUSS ACS200 Microlithography Cluster offers superior process performance and ...

30 Jun 1985

The Drytek DRIE 100 plasma etcher was the template for all cluster tools that wo ...

Anelva - MBE 831 Molecular Beam Epitaxy System :1985-89

30 Jun 1965

The elegant simplicity of this small machine belies the fact that an earlier anc ...