Gasonics - HiPOX System

Summary : Possibly the only successful high pressure system.

High pressure oxidation was an early method of depositing SiO2 films. It permitted the deposition of thick oxide films at roughly 10 times the rate of other deposition methods. Gasonics was the only company to successfully produce such a system. But Gasonics lacked a strong marketing arm in the early days of the industry. Consequently it was marketed by Applied Materials. Gasonics would eventually be acquired by Novellus, the archrival of Applied Materials.

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  • Key Contributors: Monte Tool et al.
  • Industry code: Obsolete
  • © 1978 by Applied Materials
    All Rights Reserved. Copied with the implied permission of the Copyright Owner
  • Mfr’s Code: GSNC/NVS

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