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Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...
One of the most celebrated companies in the equipment industry, Lam was once a s ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
One of the most interesting questions to answer is why are Megafabs so popular? ...
IBM is using 1X x-ray lithography to expose the gate level of 0.15 micron PowerP ...
The industry's transition to 300mm Semiconductor Wafers almost stalled in 1998, ...
Factoids from the edge: Some like to say that EUV development has cost more than ...
300mm wafer development in the mid-90s failed as a silicon cycle downturn took t ...
At ISSCC, someone predicted that fabs would soon cost $100B. Do you agree (we do ...
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