ACS200 Lithography Cluster

Organization Name :Karl Suss

Summary : The SUSS ACS200 Microlithography Cluster offers superior process performance and unsurpassed productivity for challenging coating applications including coatings of unusually thick and thin photoresist

RC8-RC33 Spin Coaters: ...

SUSS spin coaters combine state of the art technology with an innovative concept. ... See more

Karl Suss - LSX10 X-Ray ...

30 Jun 1985

The Karl Suss company was one of the first companies to explore commercial X-Ray exposure systems. ... See more

SEMATECH - An Oral Hist ...

16 Jun 1992

An interview with Dave Anderson ... See more

Varian - 3280 Cassette- ...

The time was the early eighties. Change for semiconductor equipment was in the air, you could almost smell it. ... See more

Hitachi - RA-101HL & RA ...

Rare captively made stepper with a Minolta Lens. ... See more

Ultratech - Pellicle Eq ...

Ultratech - Pellicle Equipment and Accessories - To implement the use of pellicle protected masks for projection aligners and steppers ... See more

MTI - Omnichuck

OmniChuck Advanced Wafer Processing System ... See more

Applied Materials - CA- ...

Applied Materials - CA-800 Mask Aligner and Exposure System: :1980-84 ... See more

Yan Borodovsky on DFM a ...

13 Sep 2007

Yan Borodovsky discusses DFM and Computational Lithography at Intel in historic 2007 interview. He covers what it’s about and how it’s a Chip Making Revolution ... See more

Excerpt from 1999 Annua ...

Long regarded as technology leader in etch, Lam took additional aggressive steps in fiscal 1999 to position the Company for success and to gain market share ... See more