Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.
Just as the first lights of a new millennium were dawning in 1999, ASML announce ...
This famous test system was the first truly computer-controlled IC test system.
Ultratech Stepper - Model 900 H/G Line stepper - Versatile, Adaptable, Flexible
Not the first such system, but near the first.
A pinnacle technically, it was also the end of the road for projection aligners.
An early excimer laser stepper for 0.45 micron.
A little system that was to become one of the most favored probers on the west c ...
The failure that was supposed to save the U.S. lithography infrastructure. It wa ...
Ultratech - Positive Photoresist Develop Station Model 503
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