Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.
One of the first commercial high current ion implanters.
Andy Grove talks at IMEC 2004 - the Intel Manufacturing Excellence Conference - ...
Toshio Maruyama reflects on the history and future of Advantest and its role in ...
Not many commercial machines get more exotic than this. It even looks like somet ...
A conversation with Robert N. Noyce and Karel Urbanek
Takeda Riken, the antecedent to Advantest, built it's brand on Semiconductor ATE ...
The AutoEtch 590 reduces ion bombardment and attendant device damage by placing ...
The second part of this three-part interview covers Applied Materials in the 198 ...
Cambridge Instruments - EBML 300 :1985-89 - Maskless Lithography from twenty yea ...
As semiconductor geometry device continues to shring, positive resist systems ar ...
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