Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.
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The history and accomplishments of the Semiconductor Research Corporation
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CONVAC compact equipment is derived from fully developed components of Module 20 ...
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Here is another excellent example of an early Second Optical Inspection Station ...
Thomas Sonderman discusses Automated Precision Manufacturing and how it allows A ...
Chuo Riken - Resist Processing Equipment :
SEMI's Great Moments in Semiconductor History: Invention of the IC
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