Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
One of the first commercial high current ion implanters.
Takeda Riken, the antecedent to Advantest, built it's brand on Semiconductor ATE ...
The new approach to etching and deposition: The PlanarEtch ||A Plasma systems fr ...
Technology, Circa 1991 – As lithography moved into ever lower k factors, the c ...
Electroglas - Model 3001 Wafer Prober System :1990s
Silicon Valley Group - Model 8800 ATS Track (Arm Transport System)
The versatile programmability of Kasper's System 4000 High Pressure Scrubber all ...
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