Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.
Virtually everyone seemed to be entering the semiconductor capital equipment bus ...
Here is an excellent view of a state-of-the-art diffusion furnace from the mid 1 ...
Canon - FPA-3000 EX4 Aligner :1990s
The AMI Model 2100 is an excellent representative of Second Optical Inspection s ...
Bill Tobey on his 2006 Bob Graham Award and Lessons Learned
The first commercial American X-ray lithography system.
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
As lithography moved into ever lower k factors, the concept of Phase Shifting th ...
Applied Materials led the way out of selling products to seeking solutions to cu ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
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