Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.
The Intel secret weapon that turned the industry upside-down and revolutionized ...
Jim Bowen talks about how he took Fairchild Test Systems Group from a money lose ...
Canon - FPA-5000 ES2 Aligner :1990s - An early DUV scanner.
A pinnacle technically, it was also the end of the road for projection aligners.
The AutoEtch 590 reduces ion bombardment and attendant device damage by placing ...
Accelerators Inc was one of the three or four early implementers of ion implante ...
The TP 6000 model has been designed and developed according to a very modular co ...
The push for sub-micron line features sprouted several experimental attempts, am ...
Setek - MS-610 Series Resist Processing
Cameca - 600 Series Steppers :1980-84
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