OmniChuck Advanced Wafer Processing System
MultiFab's modular design provides easy reconfiguration, maintenance and repair.
FSI - Polaris, Coating System :1990s
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A pinnacle technically, it was also the end of the road for projection aligners.
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Mihir on the History of Automation in the Semiconductor Industry
Applied Materials - 7830Si CD-SEM :1990s - Opal’s child.
Applied Materials - AMS 1000 Silox Reactor :1970s
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