Summary : The 8251 single cassette, horizontal, on-center clean machine features the high quality and ruggedness of construction you expect from FSI.
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Bill Tobey on his 2006 Bob Graham Award and Lessons Learned
This famous test system was the first truly computer-controlled IC test system.
A pinnacle technically, it was also the end of the road for projection aligners.
A 6th gen maskless litho tool from the early 80's.
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