Model 8720 Tungsten CVD System by Genus
This system, from about 1988, represents one of the most successful tungsten deposition systems. It could easily put down blanket tungsten, and though the brochures claimed it could do selective tungsten, no company ever successfully put selective tungsten into production.
Still, this system represented a great leap forward in automation for Genus. It came at a time when the American equipment suppliers were losing market share to the Japanese for reliability issues. This system was designed with production in mind, with a full suite of self-diagnostics. It was also one of the first systems to incorporate a GUI and use software as a significant differentiator over Japanese systems.
One of the interesting things about this brochure is the degree to which Genus emphasized reliability and its global service capability. This is in stark contrast to brochures from earlier periods that emphasized technology.
- Key Contributors: To Be Recognized.
- Industry code: 1463.414
- ©1989 Genus, Inc.
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- Mfr’s Code: GNS