Summary : Microlite 150 Series Photostabilizer Systems provide a clean one-step process for hardening of photoresists at high production throughput.
Gemini-The Platform of Excellence for Photoresist Processing
The 200PCU Photostabilizer utilizes the standard dual unicassette wafer handling ...
Dual Chamber Photostabilizer
1961: First Monolithic Silicon IC Chip. Invented by Robert Noyce, Fairchild
Today the company is known as Verigy and they are considered a powerhouse of sem ...
TEL's Clean Track Photoresist Processing System
Advantest - T3342 VLSI Test System :1985-89
Not the first such system, but near the first.
Takeda Riken, the antecedent to Advantest, built it's brand on Semiconductor ATE ...
The push for sub-micron line features sprouted several experimental attempts, am ...
Access to and use of this Website is subject to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy.
Copyright © 2020 VLSI Research Inc. All rights reserved.