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Decade |
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Pre-History |
 1958: The Integrated Circuit Invented |
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Fairchild Semiconductor Corporation - Fairchild Silicon
Transistors |
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First Monolithic
Silicon IC Chip |
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The First IC by Jack
Kilby |
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1960's
-- The Infant Industry |
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AAI - Series 1000 Automatic Test System |
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Applied Materials -
AMV CVD Reactors - A hint of what would become the cluster
tool. |
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DW
Industries - Model 632 Vacuum Deposition System |
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Electroglas
- Model
131B wafer prober, pathfinder to fully automated wafer
processing |
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Fairchild
Instrumentation - Model 4000M IC Test System - Workhorse of the
infant industry. |
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Pacific
Western - The Probe II Wafer Prober by Pacific Western Systems - The First Intelligent Wafer Probe System. |
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Teradyne
- J259
- The first true, computer controlled, IC Test System |
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Thermco - Diffusion Furnace |
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1970's
-- Early Developments |
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Accelerators Inc.- 400 Series Ion Implanters |
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ADAR - Doctor, Memory Tester |
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ADAR - MX-17 LSI Test System |
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Applied Materials - Series 7600 Epitaxial Reactor System -
The system that built the company. |
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Canon - PLA 501F/FA Proximity Aligner |
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Cobilt - Autofab, Inline Resist Processing System |
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Electromask - 700SLR Stepper - Arguably the best stepper of
its day, based on resale values. |
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Fairchild
Systems Technology - Sentry 400 - Possibly the
1st high speed, high pin count, LSI Test System. |
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Gasonics
- HiPOX
System - Possibly the only successful high pressure system. |
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GCA
- The Mann 3600 Photo Repeater |
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GCA
- Mann
4800 Direct Step on Wafer System - It broke the 1 micron CD barrier. |
GCA - Wafertrac® Resist Processing System - Remember air
track? It was all the rage in the days when technocool won out
over particle counts. Ask anyone who ever sold one, these were
one of the worst tools ever sold. Yet they
sold them by the
boat load – ask anyone who sold against them. |
Intel 4004
- The World's First Microprocessor and more! A series that shows
the evolution of Intel’s MPUs
from the 4004 through
the Pentium® 4 |
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Intel - 8008 CPU |
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LFE
Corporation - 501 Chrome Etch System - Not the first such system,
but near the first. |
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Lintott - Early Ion Implanter - One of the first commercial high
current ion implanters. |
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Macrodata - MD100 Test System |
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MRC
- Series 900 In-Line Sputtering System |
Perkin
Elmer - Micralign Projection Mask Alignment System -
The
Intel secret weapon that turned the
industry upside-down and
revolutionized lithography. |
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Tempress
- Model 216 Pyrox Reactor |
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Transistor
Automation
- Model XY540, Automatic Wafer Probing Machine
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Veeco
- ai Model 2100 Ion Implanter |
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1980's
-- The Cambrian Period
for Equipment |
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1980-84 |
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AMI - Series 2000, 2nd Op Station |
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Applied Materials - AME
8100 Batch Etcher - The blockbuster that remapped the etch
market. |
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ASM Assembly Automation - PF530, 3rd Op Station |
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ASML - PAS 2000 Wafer Stepper |
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Cameca - ARW Aligner Repeater |
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Canon - Model FPA141 Projection Aligner |
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Cobilt
- Model AF110 Brushless Scrubber |
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Dage Precima - IS-4, 2nd Op Station |
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Drytek
- DRIE 100 Plasma Etcher |
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High Voltage Engineering - Megavolt Ion Implantation Systems |
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Hitachi - RA-101HL & RA501HL Wafer Stepper
- Rare captively made stepper with
a Minolta Lens. |
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JEOL - JBX-6A Electron Beam Exposure System - A 6th gen
maskless litho tool from the early 80’s. |
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KLA-Tencor - KLA ADD/100 Series - The dawn of automated inspection. |
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KLA-Tencor - KLA 2020 - The tool that sparked the yield
management revolution. |
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Micronix
- MX-15 X-Ray Lithography System -
The first commercial American X-ray lithography system. |
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Pacific Western
- Model 560 ‘COYOTE’ PECVD System |
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Screen -
The P210 Wet Processing System |
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Tegal - Plasma Inline 700 Single Wafer Etcher
- What the cutting edge of etching
looked like in 1980. |
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TEL - Model TMC 4400-A Wafer Prober |
Varian - 3280 Cassette-to-Cassette Sputtering System - The
3180 was the blockbuster of the early
eighties. The 3280 was an
extension of this great line that came
in 1985. |
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Varian
- The MBE GEN II - Molecular Beam Epitaxy |
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Varian - VLS 1000 Electron Beam Lithography |
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Veeco - Mix & Match Photoresist Processing |
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1980's
-- Early Maturity |
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1985-89 |
Applied
Materials - Precision 5000 CVD, The blockbuster that made
cluster tool a household name (at least
in fab households) |
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ASML -
PAS 2500 Series Wafer Steppers
- The system that built the company. |
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Genus - 1510 MeV Ion Implanter |
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Genus - 8720 Tungsten CVD System - The cutting edge of
tungsten deposition in the late eighties. |
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IMS
- Ion Beam Exposure Tool |
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Karl Suss - LSX10 X-Ray Exposure Source |
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LASA
Industries - Prototype, The very first factory-in-a-box chip dispensing
system |
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Novellus
- Concept
One CVD Dielectric Deposition System |
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Shinkawa - SWB-FA-UTC-40 Wire Bonder |
Westech
-
Model 372 Wafer Polisher - They had the world on a string
and were sitting on a rainbow, but had
no idea of what a
customer was. The industry’s most significant
marketing failure of the nineties. |
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1990's
-- Full Maturity |
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Applied
Materials - The Mirra CMP System - The first CMP tool that was really
ready for manufacturing. |
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ASML
- PAS 5500/400, Step & Scan System - See the insides of
the product that built ASML’s leadership. |
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ASML - Twinscan, Step & Scan Aligner |
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Asyst
- SMIF System |
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Hampshire - Series 3500 X-Ray Lithography System |
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Nikon
- NSR 1755EX8A Step-and-Repeat System - An early excimer
laser stepper for 0.45 micron. |
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Verigy
- (HP) 93000 |
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