Process Diagnostics - Development of

Summary : Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes.

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Annexure :

The process diagnostic industry has become a critical subindustry to semiconductor manufacturing. As the cost to operate equipment and complexity of devices increases, it is essential that process quality be monitored to correct problems as early as possible in order to sustain yield and control costs.

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