From The Lab to The Fab

Summary : Transistors to Integrated Circuits

Courtesy of The American Institute of Physics

CP683, Characterization and Metrology for ULSI Technology: 2003 International Conference,
edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla,
and E. M. Secula. © 2003 American Institute of Physics
Reprinted with permission from American Institute of Physics

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