Transistors to Integrated Circuits: From The Lab to The Fab

Time Period :Pre-HistoryRelevant Date :1947-12-16

Summary : Transistors to Integrated Circuits: How the early semiconductor industry got from the Lab to the Fab.

Courtesy of The American Institute of Physics

Transistors to Integrated Circuits: From The Lab to The Fab

Chapter 1: Intro thru The Planar Process

CP683, Characterization and Metrology for ULSI Technology: 2003 International Conference,
edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla,
and E. M. Secula. © 2003 American Institute of Physics
Reprinted with permission from American Institute of Physics

Chapter 2: The Planar Process

Reprinted with permission from American Institute of Physics

Chapter 3: Integrated Circuit Scaling

Reprinted with permission from American Institute of Physics

Annexure :

Transistors to Integrated Circuits: How the early semiconductor industry got from the Lab to the Fab.

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