Summary : Dry processing methods are chemical processes that use a plasma to drive the reaction. Dry etching is the major segment of dry processing. Today, virtually all etching processes are dry processes. Typically, a chemical reactive gas, physical abrasion or a combination of the two are used to perform this process. Etching occurs after the resist processing stage. It involves the selective removal of films not covered by the photoresist to form interconnects, contacts and vias. The type of films ... See More
The Future of Integrated Electronics draft, written by Dr. Gordon E. Moore for E ...
The Future of Integrated Electronics draft, written by Dr. Gordon E. Moore for Electronics Magazine while he worked at Fairchild Semiconductor. This seminal paper would prove to be one of the most important pap ... See more
VLSI's Customer Satisfaction Survey Celebrates 30 Years of award winning semicon ...
VLSI's Customer Satisfaction Survey Celebrates 30 Years of award winning semiconductor equipment companies.
A Look Back... 2018 marked the 30th year VLSIresearch has released its annual Customer Satisfaction ... See more
In 1965, Gordon Moore sat down to pen his article for Electronics magazine. Even ...
In 1965, Gordon Moore sat down to pen his article for Electronics magazine. Eventually, it would come to be known as Moore's Law. This is an overview, published Forty years later, celebrating how it was still g ... See more
Automatic Test Systems (ATS) encompass a broad range of equipment-in size and in ...
Automatic Test Systems (ATS) encompass a broad range of equipment-in size and in function as well as in price. It includes all equipment that is used to electrically verify a device's functionality. VLSI Resear ... See more
Bonding and inspection has historically been overlooked by upper management in s ...
Bonding and inspection has historically been overlooked by upper management in semiconductor companies. Their attention has been drawn by the enormous capital requirements of wafer fabrication. However, this ... See more
Ion implanters directly inject dopant atoms into semiconductor wafers. A gas con ...
Ion implanters directly inject dopant atoms into semiconductor wafers. A gas containing atoms or molecules of the desired dopant 'species' is first ionized in an ion source. The ions are then extracted from the ... See more
Section 4.8 covers that equipment which does not fit in the other wafer fabricat ...
Section 4.8 covers that equipment which does not fit in the other wafer fabrication equipment categories. VLSI Research now includes two new segments under the Other Equipment classification. These segments are ... See more
Material handling equipment serves as a physical, mechanical and electronic inte ...
Material handling equipment serves as a physical, mechanical and electronic interface between test equipment and the device under test (DUT). It consists of three major subsegments commonly referred to as wafer ... See more
Process diagnostic equipment is critical to semiconductor manufacture. Though th ...
Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes. ... See more
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