Summary : Dry processing methods are chemical processes that use a plasma to drive the reaction. Dry etching is the major segment of dry processing. Today, virtually all etching processes are dry processes. Typically, a chemical reactive gas, physical abrasion or a combination of the two are used to perform this process. Etching occurs after the resist processing stage. It involves the selective removal of films not covered by the photoresist to form interconnects, contacts and vias. The type of films ... See More
Key events drawn from archived documents in VLSI's library. These documents have ...
Key events drawn from archived documents in VLSI's library. These documents have been carefully selected for their historical significance. ... See more
AMD's and Intel's can be traced back to Fairchild and Shockley Transistor with t ...
AMD's and Intel's can be traced back to Fairchild and Shockley Transistor with this genealogy of semiconductor start-ups in Silicon Valley. The poster was created by SEMI poster. It shows the history of semicon ... See more
Historical perspective on Moore’s Law and its affects on everyday life and eco ...
Historical perspective on Moore’s Law and its affects on everyday life and economic growth for the world as a whole from the fruits brought by semiconductor technology through a 2005 lens. ... See more
The replacement of optical lithography with e-beam direct write for semiconducto ...
The replacement of optical lithography with e-beam direct write for semiconductor manufacturing has been predicted since Gordon Moore penned his 1965 paper, writing "It is worth noting that this density of comp ... See more
Section 4.8 covers that equipment which does not fit in the other wafer fabricat ...
Section 4.8 covers that equipment which does not fit in the other wafer fabrication equipment categories. VLSI Research now includes two new segments under the Other Equipment classification. These segments are ... See more
The early nineties, brought a renaissance to packaging due to a demand for more ...
The early nineties, brought a renaissance to packaging due to a demand for more I/0, smaller sizes, higher power, faster speed and control of thermal properties. These demands drove the need for more sophistic ... See more
The sweeping revolution brought about by integrated circuits has caused change n ...
The sweeping revolution brought about by integrated circuits has caused change not only in electronics, but also in the very act of manufacturing the integrated circuit itself. Process equipment, assembly equip ... See more
Questor systems consist of those types of equipment used in the design, verifica ...
Questor systems consist of those types of equipment used in the design, verification, handling, inspection and test of integrated circuits. This equipment, although critical in assuring device design or design ... See more
Material handling equipment serves as a physical, mechanical and electronic inte ...
Material handling equipment serves as a physical, mechanical and electronic interface between test equipment and the device under test (DUT). It consists of three major subsegments commonly referred to as wafer ... See more
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