Summary : Dry processing methods are chemical processes that use a plasma to drive the reaction. Dry etching is the major segment of dry processing. Today, virtually all etching processes are dry processes. Typically, a chemical reactive gas, physical abrasion or a combination of the two are used to perform this process. Etching occurs after the resist processing stage. It involves the selective removal of films not covered by the photoresist to form interconnects, contacts and vias. The type of films ... See More
Key events drawn from archived documents in VLSI's library. These documents have ...
Key events drawn from archived documents in VLSI's library. These documents have been carefully selected for their historical significance. ... See more
The Future of Integrated Electronics draft, written by Dr. Gordon E. Moore for E ...
The Future of Integrated Electronics draft, written by Dr. Gordon E. Moore for Electronics Magazine while he worked at Fairchild Semiconductor. This seminal paper would prove to be one of the most important pap ... See more
The Invention of the Transistor and the Birth of the Information Age. Michael Ri ...
The Invention of the Transistor and the Birth of the Information Age. Michael Riordan, co-author of Crystal Fire, discusses how it came to be. ... See more
Historical perspective on Moore’s Law and its affects on everyday life and eco ...
Historical perspective on Moore’s Law and its affects on everyday life and economic growth for the world as a whole from the fruits brought by semiconductor technology through a 2005 lens. ... See more
Bonding and inspection has historically been overlooked by upper management in s ...
Bonding and inspection has historically been overlooked by upper management in semiconductor companies. Their attention has been drawn by the enormous capital requirements of wafer fabrication. However, this ... See more
Process diagnostic equipment is critical to semiconductor manufacture. Though th ...
Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes. ... See more
This section examines the vendors who supply semiconductor manufacturing equipm ...
This section examines the vendors who supply semiconductor manufacturing equipment. There are approximately 534 of them. The top five are shown below in Figure 2.0.0-1. In 1989, these five companies held a 26 ... See more
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