Summary : Dry processing methods are chemical processes that use a plasma to drive the reaction. Dry etching is the major segment of dry processing. Today, virtually all etching processes are dry processes. Typically, a chemical reactive gas, physical abrasion or a combination of the two are used to perform this process. Etching occurs after the resist processing stage. It involves the selective removal of films not covered by the photoresist to form interconnects, contacts and vias. The type of films ... See More
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more
The History of the invention of the Integrated Circuit. Why it wasn't so predict ...
The History of the invention of the Integrated Circuit. Why it wasn't so predictable. Corporate culture played no small part in influencing how a small west coast start-up named Fairchild and a company that mad ... See more
VLSI's Customer Satisfaction Survey Celebrates 30 Years of award winning semicon ...
VLSI's Customer Satisfaction Survey Celebrates 30 Years of award winning semiconductor equipment companies.
A Look Back... 2018 marked the 30th year VLSIresearch has released its annual Customer Satisfaction ... See more
Crashing into Moore's Wall is like a conspiracy theory: it can never be disprove ...
Crashing into Moore's Wall is like a conspiracy theory: it can never be disproved to the true believers that our industry is about to run into a wall that has never appeared. Back in the mid-nineties, Scientifi ... See more
There are three market segments of the diffusion/oxidation equipment industry. T ...
There are three market segments of the diffusion/oxidation equipment industry. They are diffusion, high pressure oxidation and rapid thermal processing, as depicted in Figure 4.4.0-1. ... See more
Process diagnostic equipment is critical to semiconductor manufacture. Though th ...
Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes. ... See more
The sweeping revolution brought about by integrated circuits has caused change n ...
The sweeping revolution brought about by integrated circuits has caused change not only in electronics, but also in the very act of manufacturing the integrated circuit itself. Process equipment, assembly equip ... See more
Process diagnostic equipment is critical to semiconductor manufacture. Though th ...
Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes. ... See more
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