Summary : Dry processing methods are chemical processes that use a plasma to drive the reaction. Dry etching is the major segment of dry processing. Today, virtually all etching processes are dry processes. Typically, a chemical reactive gas, physical abrasion or a combination of the two are used to perform this process. Etching occurs after the resist processing stage. It involves the selective removal of films not covered by the photoresist to form interconnects, contacts and vias. The type of films ... See More
Key events drawn from archived documents in VLSI's library. These documents have ...
Key events drawn from archived documents in VLSI's library. These documents have been carefully selected for their historical significance. ... See more
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more
Lithography has long been regarded as the queen of wafer fabrication in the driv ...
Lithography has long been regarded as the queen of wafer fabrication in the drive towards submicron geometries. But, in recent years problems with depth-of-focus and materials have limited lithography's ability ... See more
Ion implanters directly inject dopant atoms into semiconductor wafers. A gas con ...
Ion implanters directly inject dopant atoms into semiconductor wafers. A gas containing atoms or molecules of the desired dopant 'species' is first ionized in an ion source. The ions are then extracted from the ... See more
Bonding and inspection has historically been overlooked by upper management in s ...
Bonding and inspection has historically been overlooked by upper management in semiconductor companies. Their attention has been drawn by the enormous capital requirements of wafer fabrication. However, this ... See more
This section examines the vendors who supply semiconductor manufacturing equipm ...
This section examines the vendors who supply semiconductor manufacturing equipment. There are approximately 534 of them. The top five are shown below in Figure 2.0.0-1. In 1989, these five companies held a 26 ... See more
Process diagnostic equipment is critical to semiconductor manufacture. Though th ...
Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes. ... See more
Key images drawn from donated and archived documents in VLSI's library. These im ...
Key images drawn from donated and archived documents in VLSI's library. These images have been carefully selected for their historical significance as they show history in the making. ... See more
Material handling equipment serves as a physical, mechanical and electronic inte ...
Material handling equipment serves as a physical, mechanical and electronic interface between test equipment and the device under test (DUT). It consists of three major subsegments commonly referred to as wafer ... See more
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