Semiconductor Deposition

Summary : Lithography has long been regarded as the queen of wafer fabrication in the drive towards submicron geometries. But, in recent years problems with depth-of-focus and materials have limited lithography's ability to drive the industry. Consequently, it has yielded its crown to thin film deposition.

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Annexure :

Deposition has replaced lithography as the most important technology in semiconductor manufacturing. Deposition is segmented into CVD, PVD and Epitaxy. CVD has replaced PVD as the most important deposition technology.

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