Paradigms of Maskless Lithography, IEEE Lithography Workshop: 1999

Summary : The replacement of optical lithography with e-beam direct write for semiconductor manufacturing has been predicted since Gordon Moore penned his 1965 paper, writing "It is worth noting that this density of components can be achieved by present optical techniques and does not require the more exotic electron beam operations which are being studied for the possibility of making even smaller structures." This paper showed why it never happened.

IEEE Lithography Workshop - Historical Prespective

IEEE Lithography Workshop - Historical Prespective E-Beam

IEEE Lithography Workshop - Economics of Direct Write

IEEE Lithography Workshop - 1974-2004 History & Forcast

IEEE Lithography Workshop - Economics of Direct Write E-beam Mythology

IEEE Lithography Workshop - Economics of Direct Write Data Complxity

IEEE Lithography Workshop - Economics of Direct Write Computional Requirements

IEEE Lithography Workshop - Economics of Direct Write in 1999

IEEE Lithography Workshop - Economics of Direct Write in 2005

IEEE Lithography Workshop - Economics of Direct Write E-Beam

IEEE Lithography Workshop - Practical & Cultural Barriers

IEEE Lithography Workshop - Practical & Cultural Barriers Fear

IEEE Lithography Workshop - Practical & Cultural Barriers Yield

IEEE Lithography Workshop - Practical & Cultural Barriers There's Lots of Competition

IEEE Lithography Workshop - Practical & Cultural Barriers Optical Lithography's History

IEEE Lithography Workshop - Practical & Cultural Barriers Optical Lithography's Future

IEEE Lithography Workshop - Concludions Next Generation Lithography

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