Paradigms of Maskless Lithography, IEEE Lithography Workshop: 1999

Summary : The replacement of optical lithography with e-beam direct write for semiconductor manufacturing has been predicted since Gordon Moore penned his 1965 paper, writing "It is worth noting that this density of components can be achieved by present optical techniques and does not require the more exotic electron beam operations which are being studied for the possibility of making even smaller structures." This paper showed why it never happened.

IEEE Lithography Workshop - Historical Prespective

IEEE Lithography Workshop - Historical Prespective E-Beam

IEEE Lithography Workshop - Economics of Direct Write

IEEE Lithography Workshop - 1974-2004 History & Forcast

IEEE Lithography Workshop - Economics of Direct Write E-beam Mythology

IEEE Lithography Workshop - Economics of Direct Write Data Complxity

IEEE Lithography Workshop - Economics of Direct Write Computional Requirements

IEEE Lithography Workshop - Economics of Direct Write in 1999

IEEE Lithography Workshop - Economics of Direct Write in 2005

IEEE Lithography Workshop - Economics of Direct Write E-Beam

IEEE Lithography Workshop - Practical & Cultural Barriers

IEEE Lithography Workshop - Practical & Cultural Barriers Fear

IEEE Lithography Workshop - Practical & Cultural Barriers Yield

IEEE Lithography Workshop - Practical & Cultural Barriers There's Lots of Competition

IEEE Lithography Workshop - Practical & Cultural Barriers Optical Lithography's History

IEEE Lithography Workshop - Practical & Cultural Barriers Optical Lithography's Future

IEEE Lithography Workshop - Concludions Next Generation Lithography

Images in Semiconductor ...

16 Jun 2008

Key events drawn from archived documents in VLSI's library. These documents have been carefully selected for their historical significance. ... See more

Silicon Valley Genealog ...

AMD's and Intel's can be traced back to Fairchild and Shockley Transistor with this genealogy of semiconductor start-ups in Silicon Valley. The poster was created by SEMI poster. It shows the history of semicon ... See more

Tencor at 20 Years

Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more

The invention of the IC ...

23 Jan 1958

The History of the invention of the Integrated Circuit. Why it wasn't so predictable. Corporate culture played no small part in influencing how a small west coast start-up named Fairchild and a company that mad ... See more

Customer Satisfaction L ...

15 Jun 2018

VLSI's Customer Satisfaction Survey Celebrates 30 Years of award winning semiconductor equipment companies. A Look Back... 2018 marked the 30th year VLSIresearch has released its annual Customer Satisfaction ... See more

Silicon and the Microel ...

The emergence of crystalline silicon and silicon-based material such as silicon-germanium as the premier material and the personnel driving the integrated circuit (IC) microelectronics revolution will be review ... See more

Ion Implantation - Deve ...

Ion implanters directly inject dopant atoms into semiconductor wafers. A gas containing atoms or molecules of the desired dopant 'species' is first ionized in an ion source. The ions are then extracted from the ... See more

Semiconductor Bonding & ...

Bonding and inspection has historically been overlooked by upper management in semiconductor companies. Their attention has been drawn by the enormous capital requirements of wafer fabrication. However, this ... See more

Process Diagnostics - D ...

Process diagnostic equipment is critical to semiconductor manufacture. Though this equipment is not used to directly manufacture devices, it serves to verify consistent and in-control manufacturing processes. ... See more

Introduction to Assembl ...

Assembly equipment consists of those types of equipment used to separate the completed wafer into its individual dice and to assemble each die into its own package. The assembly equipment market comprises roug ... See more