Summary : There are three market segments of the diffusion/oxidation equipment industry. They are diffusion, high pressure oxidation and rapid thermal processing, as depicted in Figure 4.4.0-1.
Key events drawn from archived documents in VLSI's library. These documents have ...
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Section 4.8 covers that equipment which does not fit in the other wafer fabricat ...
Questor systems consist of those types of equipment used in the design, verifica ...
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