Semiconductor Diffusion & Oxidation

Summary : There are three market segments of the diffusion/oxidation equipment industry. They are diffusion, high pressure oxidation and rapid thermal processing, as depicted in Figure 4.4.0-1.

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Annexure :

The diffusion market is defined by three market segments: diffusion furnaces, high pressure oxidation and rapid thermal processes. These systems are used to grow or deposit thin insulating films and to redistribute dopant layers.

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