In the News: Technology, Crica 1981

Organization Name :KLA-TencorTime Period :1980'sRelevant Date :1981-06-01

Summary : This technical paper laid out the future of yield management, covering all the issues the industry faced with defects and gave a vision for resolving them. It became the foundation on which KLA was built. Published sometime in 1981, it is a landmark in visionary work.

KLA 200 Series Reticle ...

15 Jun 1984

KLA's Reticle Inspection System was the first automatic inspection system to ensure that killer defects as small as 0.7 microns on both reticles and photomasks would be detected. ... See more

Tencor at 20 Years

Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more

KLA-Tencor - KLA 2020

30 Jun 1985

The tool that sparked the yield management revolution. ... See more

KLA Conquers Phase Shif ...

20 May 1991

Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask. ... See more

KLA Conquers the Pellic ...

16 Nov 1981

Technology, Circa 1981 – It's often the overlooked news that turn out to be critical turning points. The pellicle was one such event. Being able to inspect them was even more critical and a large barrier to o ... See more

KLA-Tencor - KLA ADD/10 ...

01 Jan 1980

The dawn of automated inspection. KLA's mask inspection tools took over to see what humans could not, launching what would become a great company by pushing barriers aside. ... See more

Applied Materials - End ...

12 Jul 1990

Applied Materials - Endura 5500 PVD: The first bullet-proof multi-chamber, multi-process system. It would become the most successful metallization system in the history of the semiconductor industry. ... See more

Environmental Health an ...

15 Sep 1994

The semiconductor industry has always worked hard to have and to maintain extremely high health and safety levels. ... See more

Macrodata - MD100 Test ...

30 Jun 1975

This little bench-top tester was a real Mighty Mouse© as the sixties ended and the seventies began. It became the major tester of early semiconductor memories such as the 1103, the 2048, and the 4096. ... See more

Fusion - MICROLITE Seri ...

Microlite 150 Series Photostabilizer Systems provide a clean one-step process for hardening of photoresists at high production throughput. ... See more