Summary : Imaging with photons has always been the go-to technology for inspection and metrology because it’s faster, cheaper, and more reliable than imaging with electrons.
Keith Wells — All Star 2021: Imaging with photons has always been the go-to technology for inspection and metrology because it's faster, cheaper, and more reliable than imaging with electrons. So it's been pushed far farther than anyone ever thought possible. But it's been running out of steam as we went deep into the single-digit nanometer realm. Under Keith's guidance, Applied has systematically addressed the weaknesses of electron imaging so they can be taken out of the lab and put in the fab next to conventional tools.
